Dataset: Using HAXPES to quantify depth profiles through coatings using glow discharge optical emission spectroscopy (pulsed RF GD-OES)

  • Muriel Bouttemy (Creator)
  • Solène Béchu (Contributor)
  • Ben Spencer (Creator)
  • Pia Dally (Creator)
  • Patrick Chapon (Creator)
  • Arnaud Etcheberry (Creator)



Chemical characterization at buried interfaces is a real challenge, as the physico-chemical processes operating at the interface govern the properties of many systems and devices. We have developed a methodology based on the combined use of pulsed RF GD-OES (pulsed Radio Frequency Glow Discharge Optical Emission Spectrometry) and XPS (X-ray Photoelectron Spectroscopy) to facilitate the access to deeply buried locations (taking advantage of the high profiling rate of the GD-OES) and perform an accurate chemical diagnosis using XPS directly inside the GD crater. The reliability of the chemical information is, however, influenced by a perturbed layer present at the surface of the crater, hindering traditional XPS examination, due to a relatively short sampling depth. Sampling below the perturbed layer may, however, can be achieved using a higher energy excitation source with an increased sampling depth, and is enabled here by a new laboratory-based HAXPES (Hard X-ray PhotoElectron Spectroscopy) (Ga-Kα, 9.25 keV). Here we attach our dataset of these measurements (Format: Origin 8.5).
Date made available28 Jun 2021
PublisherUniversity of Manchester Figshare

Research Beacons, Institutes and Platforms

  • Henry Royce Institute


  • Pulsed RF GD-OES
  • depth profiling
  • coatings
  • surfaces and structural properties of condensed matter

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