Detail
Description
Enables rapid assessment of film thickness via stylus vertical deflection.
Maximum step-height capability: 1mm
Maximum resolution: <50nm (dependant on substrate flatness)
Stylus tip radius: 2um
Maximum substrate size: 4in wafer
Capable of assessing stress/tension induced in substrates by deposition processes.
Maximum step-height capability: 1mm
Maximum resolution: <50nm (dependant on substrate flatness)
Stylus tip radius: 2um
Maximum substrate size: 4in wafer
Capable of assessing stress/tension induced in substrates by deposition processes.
Details
| Name | Dektak Surface profiler |
|---|---|
| Manufacturers | Dektak |
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