Horiba GDOES 2

Glow Discharge Optical Emission Spectroscopy is a destructive profiler for elemental analysis. Plasma is etching the sample, while optical emission is being registered by polychromator and/or monochromator. The data is being registered as a photodetectors voltage vs time, which can be quantified to depth profile, if the sputtering rate (depth of crater after the measurements) is measured for each layer. The elemental concentration for each phase can be compared to known reference sample, but the method is not fully quantifiable.
Elements on polychromator: H, O, Cl, N, C, P, S, Pb, Au, B, Si, Cu, Zr, No, Co, Ta, Ti, Fe, Mg, Mo, Al, Mn, V, Cr, W, Zn, Na, Li, F, K.
The samples for GDOES measurements must be flat and seal vacuum against o-ring. The back face of the sample must be parallel to the front (measurement side). We have 2 and 4mm anodes, which have 6 and 8/10mm o-rings.