Details
Description
The Photon Science Institute has a cleanroom primarily for supporting the preparation and fabrication of optoelectronic devices and materials. The cleanroom meets ISO 6 (class 1000) specifications. Inside the cleanroom are a UV mask aligner, a wire bonder, thermal evaporator, spin coater, and recirculating fumehoods.
Facility keywords
- cleanroom
Research Beacons, Institutes and Platforms
- Photon Science Institute
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