Research output per year
Research output per year
Details
Description
The Platform for Nanoscale Advanced Materials Engineering (or P-NAME) enables the electronic, optical and magnetic doping of advanced materials to provide localised control of functionality with sub-20nm precision. The tool has 2 beams: 1) a multi-ion liquid metal alloy ion source FIB for sample doping and patterning; 2) an electron beam for sample imaging and exposure (SEM).
Key capabilities:
– sub-5nm resolution e-beam imaging enabling the target for doping to be identified without ion contamination;
– isotopically-selected ion doping of species from liquid metal ion sources with sub- 20nm resolution;
– deterministic single ion to high dose (e.g. 1019 ions/cm2) doping at energies from ~5 to 75 keV (species dependent);
– 150mm (6-inch) sample handling with vacuum suitcase compatibility.
– in-situ electrical measurements possible
Isotopic species available Au, Ge, Sb, Nd, Cu, Co, B, Mn, Pt, P, In, Ni, Si, Pb, Sn, Bi, Er
Further sources available upon request
Key capabilities:
– sub-5nm resolution e-beam imaging enabling the target for doping to be identified without ion contamination;
– isotopically-selected ion doping of species from liquid metal ion sources with sub- 20nm resolution;
– deterministic single ion to high dose (e.g. 1019 ions/cm2) doping at energies from ~5 to 75 keV (species dependent);
– 150mm (6-inch) sample handling with vacuum suitcase compatibility.
– in-situ electrical measurements possible
Isotopic species available Au, Ge, Sb, Nd, Cu, Co, B, Mn, Pt, P, In, Ni, Si, Pb, Sn, Bi, Er
Further sources available upon request
Keywords
- QC Physics
- Q Science (General)
- QD Chemistry
Facility keywords
- Quantum
- Focused Ion Beam
- Doping
- Advanced Materials
- Nanomaterials
- Photonics
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Research output
- 2 Article
-
Highly 28Si Enriched Silicon by Localised Focused Ion Beam Implantation
Acharya, R., Coke, M., Adshead, M., Li, K., Achinuq, B., Cai, R., Gholizadeh, A. B., Jacobs, J., Boland, J. L., Haigh, S. J., Moore, K. L., Jamieson, D. N. & Curry, R. J., 7 May 2024, In: Communications Materials. 5, 1, 57.Research output: Contribution to journal › Article › peer-review
Open Access -
A High-Resolution Versatile Focused Ion Implantation Platform for Nanoscale Engineering
Adshead, M., Coke, M., Aresta, G., Bellew, A., Lagator, M., Li, K., Cui, Y., Cai, R., Almutawa, A., Haigh, S. J., Moore, K., Lockyer, N., Gourlay, C. M. & Curry, R. J., 1 Nov 2023, In: Advanced Engineering Materials. 25, 22, 2300889.Research output: Contribution to journal › Article › peer-review
Open Access11 Downloads (Pure)
Projects
- 1 Active
-
NAME
Coke, M. (Technical team), Mckenzie, B. E. (Grant contributor), Blight, D. (PI) & Adshead, M. (PI)
31/07/21 → 31/07/26
Project: Research