Prevac: UHV System

Royce institute Ultra-High Vacuum Multi-Chamber Cluster tool. The suite consits of several UHV components linked by a 'transfer tunnel' that hosues a uhv train to move samples to the different chambers with a loadlock chamber at the end to load and condition samples. All samples must be mounted to Prevac PTS sample holders for movement around the system (including adapters for Omicron flag-style sample holders). The main components are as follows:

Core Chamber: The primary chamber is the Core Chamber (CC), this chamber houses a 12-axis remotely controlled robotic nanomanipualtor system for the assembly of 2D material heterostructures in UHV conditions. The CC has a dedicated loadlock with 6-sample receiving slots, samples can be pre-conditioned using: RF plasma (O₂, H₂/Ar, Ar gases), DC heating up to 1000°C (optionally in process gases), e-Beam heating up to 1200°C. The system has a sub-chamber for the cleaving of 2D material crystals in UHV conditions (the Anvil). Base pressure of the system is ~5x10^-10 mBar

UHV PVD system: The deposition system consists of a large desposition chamber with a heated (up to 1000°C) and rotating manipulator that the samples mount to. Deposition can be perfomed using a telemark 4-pocket electron beam evaporation source (standard materials: Al, Ti, Au, Pd) and a 2-target RF & DC magnetron sputtering system (standard materials Ta and Pt) using O₂/Ar process gases. Optionally samples can be RF plasma treated using process gases. Base pressure of system is ~1x10^-8 mBar.