2D species concentration mapping of thermal AP-CVD reactors for monitoring, control and design

D. Sawtell; V. L. Kasyutich; R. J. Holdsworth; D. W. Sheel; P. A. Martin

doi:10.1149/1.3207631

2D species concentration mapping of thermal AP-CVD reactors for monitoring, control and design

D. Sawtell, V. L. Kasyutich, R. J. Holdsworth, D. W. Sheel, P. A. Martin

Research output: Contribution to journal › Article › peer-review

Abstract

This paper describes progress towards the two-dimensional mapping of chemical species in an atmospheric pressure chemical vapour deposition (AP-CVD) reactor during the deposition process. The approach uses tunable infrared laser absorption spectroscopy to measure line-of-sight optical absorbance data for specific chemical species. 2D distributions can then be obtained by tomographic inversion techniques. The developed techniques will have advantages for monitoring, control and design of reactors. © The Electrochemical Society.

Original language	English
Pages (from-to)	501-506
Number of pages	5
Journal	ECS Transactions
Volume	25
Issue number	8
DOIs	https://doi.org/10.1149/1.3207631
Publication status	Published - 2009

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title = "2D species concentration mapping of thermal AP-CVD reactors for monitoring, control and design",

abstract = "This paper describes progress towards the two-dimensional mapping of chemical species in an atmospheric pressure chemical vapour deposition (AP-CVD) reactor during the deposition process. The approach uses tunable infrared laser absorption spectroscopy to measure line-of-sight optical absorbance data for specific chemical species. 2D distributions can then be obtained by tomographic inversion techniques. The developed techniques will have advantages for monitoring, control and design of reactors. {\textcopyright} The Electrochemical Society.",

author = "D. Sawtell and Kasyutich, {V. L.} and Holdsworth, {R. J.} and Sheel, {D. W.} and Martin, {P. A.}",

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AU - Sheel, D. W.

AU - Martin, P. A.

PY - 2009

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AB - This paper describes progress towards the two-dimensional mapping of chemical species in an atmospheric pressure chemical vapour deposition (AP-CVD) reactor during the deposition process. The approach uses tunable infrared laser absorption spectroscopy to measure line-of-sight optical absorbance data for specific chemical species. 2D distributions can then be obtained by tomographic inversion techniques. The developed techniques will have advantages for monitoring, control and design of reactors. © The Electrochemical Society.

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DO - 10.1149/1.3207631

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SP - 501

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JO - ECS Transactions

JF - ECS Transactions

IS - 8

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2D species concentration mapping of thermal AP-CVD reactors for monitoring, control and design

Abstract

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