3D silicon detectors - Status and applications

C. Davia; J. Hasi; C. Kenney; A. Kok; S. Parker

doi:10.1016/j.nima.2005.04.037

3D silicon detectors - Status and applications

C. Davia, J. Hasi, C. Kenney, A. Kok, S. Parker

Research output: Contribution to journal › Article › peer-review

Abstract

3D silicon technology is a new way to make silicon detectors using Micro-Electro-Mechanical-Systems (MEMS) processing. In this innovative design the electrodes penetrate through the silicon bulk perpendicular to the surface. Two types of device have been developed - 3D and planar 3D. Both use an edge electrode that eliminates the need for guard rings and provides sensitivity to within a few microns of the edge. 3D technology and its advantages are reviewed and examples of the two types of device are shown. © 2005 Elsevier B.V. All rights reserved.

Original language	English
Pages (from-to)	122-125
Number of pages	3
Journal	Nuclear Instruments & Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment
Volume	549
Issue number	1-3
DOIs	https://doi.org/10.1016/j.nima.2005.04.037
Publication status	Published - 1 Sept 2005

Keywords

3D detector
Active edge
Planar 3D

Access to Document

10.1016/j.nima.2005.04.037

Cite this

@article{74fd98e0a27841f98fc0c4e89ce32dca,

title = "3D silicon detectors - Status and applications",

abstract = "3D silicon technology is a new way to make silicon detectors using Micro-Electro-Mechanical-Systems (MEMS) processing. In this innovative design the electrodes penetrate through the silicon bulk perpendicular to the surface. Two types of device have been developed - 3D and planar 3D. Both use an edge electrode that eliminates the need for guard rings and provides sensitivity to within a few microns of the edge. 3D technology and its advantages are reviewed and examples of the two types of device are shown. {\textcopyright} 2005 Elsevier B.V. All rights reserved.",

keywords = "3D detector, Active edge, Planar 3D",

author = "C. Davia and J. Hasi and C. Kenney and A. Kok and S. Parker",

note = "J7",

year = "2005",

month = sep,

day = "1",

doi = "10.1016/j.nima.2005.04.037",

language = "English",

volume = "549",

pages = "122--125",

journal = "Nuclear Instruments & Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment ",

issn = "0168-9002",

publisher = "Elsevier BV",

number = "1-3",

}

TY - JOUR

T1 - 3D silicon detectors - Status and applications

AU - Davia, C.

AU - Hasi, J.

AU - Kenney, C.

AU - Kok, A.

AU - Parker, S.

N1 - J7

PY - 2005/9/1

Y1 - 2005/9/1

N2 - 3D silicon technology is a new way to make silicon detectors using Micro-Electro-Mechanical-Systems (MEMS) processing. In this innovative design the electrodes penetrate through the silicon bulk perpendicular to the surface. Two types of device have been developed - 3D and planar 3D. Both use an edge electrode that eliminates the need for guard rings and provides sensitivity to within a few microns of the edge. 3D technology and its advantages are reviewed and examples of the two types of device are shown. © 2005 Elsevier B.V. All rights reserved.

AB - 3D silicon technology is a new way to make silicon detectors using Micro-Electro-Mechanical-Systems (MEMS) processing. In this innovative design the electrodes penetrate through the silicon bulk perpendicular to the surface. Two types of device have been developed - 3D and planar 3D. Both use an edge electrode that eliminates the need for guard rings and provides sensitivity to within a few microns of the edge. 3D technology and its advantages are reviewed and examples of the two types of device are shown. © 2005 Elsevier B.V. All rights reserved.

KW - 3D detector

KW - Active edge

KW - Planar 3D

U2 - 10.1016/j.nima.2005.04.037

DO - 10.1016/j.nima.2005.04.037

M3 - Article

SN - 0168-9002

VL - 549

SP - 122

EP - 125

JO - Nuclear Instruments & Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment

JF - Nuclear Instruments & Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment

IS - 1-3

ER -

3D silicon detectors - Status and applications

Abstract

Keywords

Access to Document

Fingerprint

Cite this