3D silicon sensors: Design, large area production and quality assurance for the ATLAS IBL pixel detector upgrade

Cinzia Da Via, Maurizio Boscardin, Gian-Franco Dalla Betta, Giovanni Darbo, Celeste Fleta, Claudia Gemme, Philippe Grenier, Sebastian Grinstein, Thor Erik Hansen, Jasmine Hasi, Chris Kenney, Angela Kok, Sherwood Parker, Giulio Pellegrini, Elisa Vianello, Nicola Zorzi

    Research output: Contribution to journalArticlepeer-review

    Original languageEnglish
    Pages (from-to)321-330
    Number of pages10
    JournalNucl.Instrum.Meth.
    VolumeA694
    DOIs
    Publication statusPublished - 2012

    Keywords

    • 3D sensors
    • ATLAS upgrade
    • Radiation hard detectors
    • Silicon sensors

    Cite this