A Comparative Study of Interaction of End of Range (EOR) Defect Band with Upper Buried Oxide (BOX) Interface for B and BF(2) Implants in SOI and Bulk Silicon with Pre-Amorphizing Implant

M. Kah; A. J. Smith; J. J. Hamilton; S. H. Yeong; B. Columbeau; R. Gwilliam; R. P. Webb; K. J. Kirkby

A Comparative Study of Interaction of End of Range (EOR) Defect Band with Upper Buried Oxide (BOX) Interface for B and BF(2) Implants in SOI and Bulk Silicon with Pre-Amorphizing Implant

M. Kah, A. J. Smith, J. J. Hamilton, S. H. Yeong, B. Columbeau, R. Gwilliam, R. P. Webb, K. J. Kirkby

Division of Cancer Sciences (L5)

Research output: Chapter in Book/Conference proceeding › Chapter › peer-review

Original language	Undefined
Title of host publication	Ion Implantation Technology 2008
Publication status	Published - 2008

Research Beacons, Institutes and Platforms

Manchester Cancer Research Centre

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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title = "A Comparative Study of Interaction of End of Range (EOR) Defect Band with Upper Buried Oxide (BOX) Interface for B and BF(2) Implants in SOI and Bulk Silicon with Pre-Amorphizing Implant",

author = "M. Kah and Smith, {A. J.} and Hamilton, {J. J.} and Yeong, {S. H.} and B. Columbeau and R. Gwilliam and Webb, {R. P.} and Kirkby, {K. J.}",

year = "2008",

language = "Undefined",

booktitle = "Ion Implantation Technology 2008",

}

TY - CHAP

T1 - A Comparative Study of Interaction of End of Range (EOR) Defect Band with Upper Buried Oxide (BOX) Interface for B and BF(2) Implants in SOI and Bulk Silicon with Pre-Amorphizing Implant

AU - Kah, M.

AU - Smith, A. J.

AU - Hamilton, J. J.

AU - Yeong, S. H.

AU - Columbeau, B.

AU - Gwilliam, R.

AU - Webb, R. P.

AU - Kirkby, K. J.

PY - 2008

Y1 - 2008

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M3 - Chapter

BT - Ion Implantation Technology 2008

ER -

A Comparative Study of Interaction of End of Range (EOR) Defect Band with Upper Buried Oxide (BOX) Interface for B and BF(2) Implants in SOI and Bulk Silicon with Pre-Amorphizing Implant

Research Beacons, Institutes and Platforms

UN SDGs

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