TY - JOUR
T1 - A comparison of the properties of hard carbon films produced by direct gas deposition and plasma-assisted evaporation
AU - Dehbi-Alaoui, A
AU - James, A.S.
AU - Matthews, A.
PY - 1990
Y1 - 1990
N2 - The mechanical and optical properties of carbon films grown using direct gas deposition from a fast atom beam source are compared with those of films grown by evaporation of graphite in butane and argon d.c. or low frequency r.f. plasmas. The characteristics are found to be highly dependent on the substrate material (glass or tool steel) and are also related to process conditions, such as bias voltage and hydrogen to carbon ratio in the plasma.
AB - The mechanical and optical properties of carbon films grown using direct gas deposition from a fast atom beam source are compared with those of films grown by evaporation of graphite in butane and argon d.c. or low frequency r.f. plasmas. The characteristics are found to be highly dependent on the substrate material (glass or tool steel) and are also related to process conditions, such as bias voltage and hydrogen to carbon ratio in the plasma.
UR - http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:A1990EP99500012&KeyUID=WOS:A1990EP99500012
U2 - 10.1016/0257-8972(90)90063-I
DO - 10.1016/0257-8972(90)90063-I
M3 - Article
SN - 0257-8972
VL - 43-44
SP - 88
EP - 98
JO - Surface & Coatings Technology
JF - Surface & Coatings Technology
ER -