A Single Source Precursor for Tungsten Dichalcogenide Thin Films: Mo1-xWxS2 (0 ≤ x ≤ 1) Alloys by Aerosol-Assisted Chemical Vapor Deposition (AACVD)

Aleksander Tedstone, Edward Lewis, Nicky Savjani, Xiang Li Zhong, Sarah Haigh, Paul O'Brien, David Lewis

    Research output: Contribution to journalArticlepeer-review

    Abstract

    The coordination complex WS3L2 (where L = S2CN(CH2CH3)2 ) can be used to deposit tungsten disulfide (WS2) thin films by aerosol-assisted chemical vapour deposition (AACVD). When WS3L2 is used in conjunction with the previ-ously reported precursor, MoL4 which produces molybdenum disulfide (MoS2) by AACVD, alloyed thin films of the type Mo1-xWxS2 are produced. The W/Mo ratio can be controlled by chang-ing the relative concentrations of precursors in the carrier aerosol, allowing straightforward manipulation of the optical properties of the material and exquisite control of the final film composition.
    Original languageEnglish
    Pages (from-to)3858-3862
    Number of pages5
    JournalChemistry of Materials
    Volume29
    Issue number9
    Early online date12 Apr 2017
    DOIs
    Publication statusPublished - 9 May 2017

    Research Beacons, Institutes and Platforms

    • National Graphene Institute

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