A study of the Effect of Fluorine Implantation on Phosphorus Diffusion in Germanium

Huda El Mubarek, H. A. W. El Mubarek, A. S. Gandy, M. Alaraimi

Research output: Contribution to conference › Poster

Original language	English
Publication status	Published - May 2011
Event	European Materials Research Sociey Spring Meeting 2011 (EMRS) - Nice France Duration: 9 May 2011 → 13 May 2011

Conference	European Materials Research Sociey Spring Meeting 2011 (EMRS)
City	Nice France
Period	9/05/11 → 13/05/11

Keywords

@conference{8c8340763d834c34ac135464dab77e7b,

title = "A study of the Effect of Fluorine Implantation on Phosphorus Diffusion in Germanium",

keywords = "Germanium and Fluorine and Phosphorus",

author = "{El Mubarek}, Huda and Mubarek, {H. A. W. El} and Gandy, {A. S.} and M. Alaraimi",

year = "2011",

month = may,

language = "English",

note = "European Materials Research Sociey Spring Meeting 2011 (EMRS) ; Conference date: 09-05-2011 Through 13-05-2011",

}

TY - CONF

T1 - A study of the Effect of Fluorine Implantation on Phosphorus Diffusion in Germanium

AU - El Mubarek, Huda

AU - Mubarek, H. A. W. El

AU - Gandy, A. S.

AU - Alaraimi, M.

PY - 2011/5

Y1 - 2011/5

KW - Germanium and Fluorine and Phosphorus

M3 - Poster

T2 - European Materials Research Sociey Spring Meeting 2011 (EMRS)

Y2 - 9 May 2011 through 13 May 2011

ER -