A study of the effect of strain and Ge content on F+ implantation induced damage in SiGe investigated by in-situ Transmission Electron Microscopy

Huda El Mubarek; A. S. Gandy; M. Alraimi; H. A. W. El Mubarek

A study of the effect of strain and Ge content on F+ implantation induced damage in SiGe investigated by in-situ Transmission Electron Microscopy

Huda El Mubarek, A. S. Gandy, M. Alraimi, H. A. W. El Mubarek

Research output: Contribution to conference › Other

Original language	English
Publication status	Published - May 2011
Event	European Materials Research Society Spring Meeting 2012 - Nice France Duration: 9 May 2011 → 13 May 2011

Conference

Conference	European Materials Research Society Spring Meeting 2012
City	Nice France
Period	9/05/11 → 13/05/11

Cite this

@conference{2987e2d342d74ef981cf28d070d403e9,

title = "A study of the effect of strain and Ge content on F+ implantation induced damage in SiGe investigated by in-situ Transmission Electron Microscopy",

author = "{El Mubarek}, Huda and Gandy, {A. S.} and M. Alraimi and Mubarek, {H. A. W. El}",

year = "2011",

month = may,

language = "English",

note = "European Materials Research Society Spring Meeting 2012 ; Conference date: 09-05-2011 Through 13-05-2011",

}

TY - CONF

T1 - A study of the effect of strain and Ge content on F+ implantation induced damage in SiGe investigated by in-situ Transmission Electron Microscopy

AU - El Mubarek, Huda

AU - Gandy, A. S.

AU - Alraimi, M.

AU - Mubarek, H. A. W. El

PY - 2011/5

Y1 - 2011/5

M3 - Other

T2 - European Materials Research Society Spring Meeting 2012

Y2 - 9 May 2011 through 13 May 2011

ER -

A study of the effect of strain and Ge content on F+ implantation induced damage in SiGe investigated by in-situ Transmission Electron Microscopy

Conference

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