A traceable quantification procedure for a multi-mode X-ray photoelectron spectrometer

John Walton; Neal Fairley

doi:10.1016/j.elspec.2005.08.001

A traceable quantification procedure for a multi-mode X-ray photoelectron spectrometer

John Walton, Neal Fairley

Research output: Contribution to journal › Article › peer-review

Abstract

A modification to the quantification procedure used by a multi-mode X-ray photoelectron spectrometer (XPS) instrument is described which enables transfer of quantification between instruments, and which is referenced to a verified source. The procedure takes account of the intensity/energy response function of the instrument, which is appended to the data file, eliminating ambiguities in intensity calibration at a later date, and allowing background subtraction techniques based on electron scattering to be used on corrected spectra. A strategy is proposed to minimise inaccuracies arising from surface contamination and low signal intensity. Use of the procedure is illustrated by comparing quantification using different data processing software. © 2005 Elsevier B.V. All rights reserved.

Original language	English
Pages (from-to)	15-20
Number of pages	5
Journal	Journal of Electron Spectroscopy and Related Phenomena
Volume	150
Issue number	1
DOIs	https://doi.org/10.1016/j.elspec.2005.08.001
Publication status	Published - Jan 2006

Keywords

Quantification
Response function
Traceable
XPS

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10.1016/j.elspec.2005.08.001

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title = "A traceable quantification procedure for a multi-mode X-ray photoelectron spectrometer",

abstract = "A modification to the quantification procedure used by a multi-mode X-ray photoelectron spectrometer (XPS) instrument is described which enables transfer of quantification between instruments, and which is referenced to a verified source. The procedure takes account of the intensity/energy response function of the instrument, which is appended to the data file, eliminating ambiguities in intensity calibration at a later date, and allowing background subtraction techniques based on electron scattering to be used on corrected spectra. A strategy is proposed to minimise inaccuracies arising from surface contamination and low signal intensity. Use of the procedure is illustrated by comparing quantification using different data processing software. {\textcopyright} 2005 Elsevier B.V. All rights reserved.",

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AU - Fairley, Neal

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N2 - A modification to the quantification procedure used by a multi-mode X-ray photoelectron spectrometer (XPS) instrument is described which enables transfer of quantification between instruments, and which is referenced to a verified source. The procedure takes account of the intensity/energy response function of the instrument, which is appended to the data file, eliminating ambiguities in intensity calibration at a later date, and allowing background subtraction techniques based on electron scattering to be used on corrected spectra. A strategy is proposed to minimise inaccuracies arising from surface contamination and low signal intensity. Use of the procedure is illustrated by comparing quantification using different data processing software. © 2005 Elsevier B.V. All rights reserved.

AB - A modification to the quantification procedure used by a multi-mode X-ray photoelectron spectrometer (XPS) instrument is described which enables transfer of quantification between instruments, and which is referenced to a verified source. The procedure takes account of the intensity/energy response function of the instrument, which is appended to the data file, eliminating ambiguities in intensity calibration at a later date, and allowing background subtraction techniques based on electron scattering to be used on corrected spectra. A strategy is proposed to minimise inaccuracies arising from surface contamination and low signal intensity. Use of the procedure is illustrated by comparing quantification using different data processing software. © 2005 Elsevier B.V. All rights reserved.

KW - Quantification

KW - Response function

KW - Traceable

KW - XPS

U2 - 10.1016/j.elspec.2005.08.001

DO - 10.1016/j.elspec.2005.08.001

M3 - Article

VL - 150

SP - 15

EP - 20

JO - Journal of Electron Spectroscopy and Related Phenomena

JF - Journal of Electron Spectroscopy and Related Phenomena

IS - 1

ER -

A traceable quantification procedure for a multi-mode X-ray photoelectron spectrometer

Abstract

Keywords

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