A Transmission Electron Microscopy study of Fluorine implantation induced damage in Silicon

Huda El Mubarek, A. Gandy, H.A.W. El Mubarek, U. Bangert

Research output: Contribution to conference › Other

Original language	English
Publication status	Published - 20 Sept 2010
Event	The International Conference on Extended Defects in Semiconductors, EDS 2010 - Brighton, UK Duration: 19 Sept 2010 → 24 Sept 2010

Conference	The International Conference on Extended Defects in Semiconductors, EDS 2010
City	Brighton, UK
Period	19/09/10 → 24/09/10

Cite this

@conference{2dd9d33f792d45759e84d9a5ec9698e4,

title = "A Transmission Electron Microscopy study of Fluorine implantation induced damage in Silicon",

author = "{El Mubarek}, Huda and A. Gandy and Mubarek, {H.A.W. El} and U. Bangert",

year = "2010",

month = sep,

day = "20",

language = "English",

note = "The International Conference on Extended Defects in Semiconductors, EDS 2010 ; Conference date: 19-09-2010 Through 24-09-2010",

}