A typical filter design to improve the measured signals from MEMS accelerometer

Abdellatef E. Badri, Jyoti K. Sinha, Alhussein Albarbar

    Research output: Contribution to journalArticlepeer-review

    Abstract

    MEMS accelerometers have received attention owing to their low cost and small size. Accurate vibration measurements of both amplitude and phase, in the measurement frequency range, are important for reliable vibration analysis. However, a number of MEMS accelerometers from different manufacturers show some deviation, in amplitude and phase, when examined using controlled vibration laboratory measurements. This paper presents a method to improve MEMS accelerometers performance. Through the laboratory measurements, a characteristic function (CF) for a typical MEMS accelerometer has been calculated, with reference to a standard accelerometer. Using the CF, a filter has been designed for the MEMS accelerometer, which corrects for amplitude and phase deviation. © 2010 Elsevier Ltd. All rights reserved.
    Original languageEnglish
    Pages (from-to)1425-1430
    Number of pages5
    JournalMeasurement: Journal of the International Measurement Confederation
    Volume43
    Issue number10
    DOIs
    Publication statusPublished - Dec 2010

    Keywords

    • Condition monitoring
    • Filter characteristics
    • Frequency response function
    • Micro-elecromechanical system (MEMS) accelerometer
    • Vibration measurements

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