AACVD of Molybdenum Sulfide and Oxide Thin Films From Molybdenum(V)-based Single-source Precursors

Nicky Savjani; Jack R. Brent; Paul O'Brien

doi:10.1002/cvde.201407135

AACVD of Molybdenum Sulfide and Oxide Thin Films From Molybdenum(V)-based Single-source Precursors

Nicky Savjani, Jack R. Brent, Paul O'Brien

National Graphene Institute L5

Research output: Contribution to journal › Article › peer-review

Abstract

The decomposition of Mo₂O₃(S₂CNEt₂) ₄ (1) and Mo₂O₃(S₂COEt)₄(2) single-source precursors (SSPs) via aerosol-assisted (AA⁻) CVD onto glass substrates is reported. The films grown from 2 are achieved at a lower temperature than 1 (300 and 425 °C, respectively), potentially attributable to the Chugaev elimination mechanism. Raman spectroscopy (RS) and scanning electron microscopy (SEM) show the composition of the films to be variable; films that are grown from the AACVD reaction of 1 are found to be of pure MoS₂ nanoplates, whereas those grown from 2 consist of MoO₃ microparticles and MoO₂ noncrystalline films, together with various nanostructures of MoS₂, depending on deposition temperature. The decomposition processes of the SSPs are assessed to determine why these variations in thin films are seen.

Original language	English
Pages (from-to)	71-77
Number of pages	7
Journal	Chemical Vapor Deposition
Volume	21
Issue number	1-3
Early online date	7 Jan 2015
DOIs	https://doi.org/10.1002/cvde.201407135
Publication status	Published - Mar 2015

Keywords

AACVD
breakdown mechanism
molybdenum oxides
molybdenum sulfides
two-dimensional structures

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10.1002/cvde.201407135

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@article{105529bf6a4a4a34827586302edd95e7,

title = "AACVD of Molybdenum Sulfide and Oxide Thin Films From Molybdenum(V)-based Single-source Precursors",

abstract = "The decomposition of Mo2O3(S2CNEt2) 4 (1) and Mo2O3(S2COEt)4 (2) single-source precursors (SSPs) via aerosol-assisted (AA−) CVD onto glass substrates is reported. The films grown from 2 are achieved at a lower temperature than 1 (300 and 425 °C, respectively), potentially attributable to the Chugaev elimination mechanism. Raman spectroscopy (RS) and scanning electron microscopy (SEM) show the composition of the films to be variable; films that are grown from the AACVD reaction of 1 are found to be of pure MoS2 nanoplates, whereas those grown from 2 consist of MoO3 microparticles and MoO2 noncrystalline films, together with various nanostructures of MoS2, depending on deposition temperature. The decomposition processes of the SSPs are assessed to determine why these variations in thin films are seen.",

keywords = "AACVD, breakdown mechanism, molybdenum oxides, molybdenum sulfides, two-dimensional structures",

author = "Nicky Savjani and Brent, {Jack R.} and Paul O'Brien",

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year = "2015",

month = mar,

doi = "10.1002/cvde.201407135",

language = "English",

volume = "21",

pages = "71--77",

journal = "Chemical Vapor Deposition",

issn = "0948-1907",

publisher = "John Wiley & Sons Ltd",

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T1 - AACVD of Molybdenum Sulfide and Oxide Thin Films From Molybdenum(V)-based Single-source Precursors

AU - Savjani, Nicky

AU - Brent, Jack R.

AU - O'Brien, Paul

N1 - Times Cited: 2 0 2

PY - 2015/3

Y1 - 2015/3

N2 - The decomposition of Mo2O3(S2CNEt2) 4 (1) and Mo2O3(S2COEt)4 (2) single-source precursors (SSPs) via aerosol-assisted (AA−) CVD onto glass substrates is reported. The films grown from 2 are achieved at a lower temperature than 1 (300 and 425 °C, respectively), potentially attributable to the Chugaev elimination mechanism. Raman spectroscopy (RS) and scanning electron microscopy (SEM) show the composition of the films to be variable; films that are grown from the AACVD reaction of 1 are found to be of pure MoS2 nanoplates, whereas those grown from 2 consist of MoO3 microparticles and MoO2 noncrystalline films, together with various nanostructures of MoS2, depending on deposition temperature. The decomposition processes of the SSPs are assessed to determine why these variations in thin films are seen.

AB - The decomposition of Mo2O3(S2CNEt2) 4 (1) and Mo2O3(S2COEt)4 (2) single-source precursors (SSPs) via aerosol-assisted (AA−) CVD onto glass substrates is reported. The films grown from 2 are achieved at a lower temperature than 1 (300 and 425 °C, respectively), potentially attributable to the Chugaev elimination mechanism. Raman spectroscopy (RS) and scanning electron microscopy (SEM) show the composition of the films to be variable; films that are grown from the AACVD reaction of 1 are found to be of pure MoS2 nanoplates, whereas those grown from 2 consist of MoO3 microparticles and MoO2 noncrystalline films, together with various nanostructures of MoS2, depending on deposition temperature. The decomposition processes of the SSPs are assessed to determine why these variations in thin films are seen.

KW - AACVD

KW - breakdown mechanism

KW - molybdenum oxides

KW - molybdenum sulfides

KW - two-dimensional structures

U2 - 10.1002/cvde.201407135

DO - 10.1002/cvde.201407135

M3 - Article

SN - 0948-1907

VL - 21

SP - 71

EP - 77

JO - Chemical Vapor Deposition

JF - Chemical Vapor Deposition

IS - 1-3

ER -

AACVD of Molybdenum Sulfide and Oxide Thin Films From Molybdenum(V)-based Single-source Precursors

Abstract

Keywords

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