Active-edge planar radiation sensors

C. J. Kenney; J. D. Segal; E. Westbrook; Sherwood Parker; J. Hasi; C. Da Via; S. Watts; J. Morse

doi:10.1016/j.nima.2006.05.012

Active-edge planar radiation sensors

C. J. Kenney, J. D. Segal, E. Westbrook, Sherwood Parker, J. Hasi, C. Da Via, S. Watts, J. Morse

Research output: Contribution to journal › Article › peer-review

Abstract

Many systems in medicine, biology, high-energy physics, and astrophysics require large area radiation sensors. In most of these applications, minimizing the amount of dead area or dead material is crucial. We have developed a new type of silicon radiation sensor in which the device is active to within a few microns of the mechanical edge. Their perimeter is made by a plasma etcher rather than a diamond saw. Their edges can be defined and also passivated by growing, in an intermediate step, a field oxide on the side surfaces. In this paper, the basic architecture and results from a synchrotron beam test are presented. © 2006.

Original language	English
Pages (from-to)	272-277
Number of pages	5
Journal	Nuclear Instruments & Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment
Volume	565
Issue number	1
DOIs	https://doi.org/10.1016/j.nima.2006.05.012
Publication status	Published - 1 Sept 2006

Keywords

3D
Active edge
Silicon radiation detectors
Silicon radiation sensors

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10.1016/j.nima.2006.05.012

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title = "Active-edge planar radiation sensors",

abstract = "Many systems in medicine, biology, high-energy physics, and astrophysics require large area radiation sensors. In most of these applications, minimizing the amount of dead area or dead material is crucial. We have developed a new type of silicon radiation sensor in which the device is active to within a few microns of the mechanical edge. Their perimeter is made by a plasma etcher rather than a diamond saw. Their edges can be defined and also passivated by growing, in an intermediate step, a field oxide on the side surfaces. In this paper, the basic architecture and results from a synchrotron beam test are presented. {\textcopyright} 2006.",

keywords = "3D, Active edge, Silicon radiation detectors, Silicon radiation sensors",

author = "Kenney, {C. J.} and Segal, {J. D.} and E. Westbrook and Sherwood Parker and J. Hasi and {Da Via}, C. and S. Watts and J. Morse",

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TY - JOUR

T1 - Active-edge planar radiation sensors

AU - Kenney, C. J.

AU - Segal, J. D.

AU - Westbrook, E.

AU - Parker, Sherwood

AU - Hasi, J.

AU - Da Via, C.

AU - Watts, S.

AU - Morse, J.

N1 - J15

PY - 2006/9/1

Y1 - 2006/9/1

N2 - Many systems in medicine, biology, high-energy physics, and astrophysics require large area radiation sensors. In most of these applications, minimizing the amount of dead area or dead material is crucial. We have developed a new type of silicon radiation sensor in which the device is active to within a few microns of the mechanical edge. Their perimeter is made by a plasma etcher rather than a diamond saw. Their edges can be defined and also passivated by growing, in an intermediate step, a field oxide on the side surfaces. In this paper, the basic architecture and results from a synchrotron beam test are presented. © 2006.

AB - Many systems in medicine, biology, high-energy physics, and astrophysics require large area radiation sensors. In most of these applications, minimizing the amount of dead area or dead material is crucial. We have developed a new type of silicon radiation sensor in which the device is active to within a few microns of the mechanical edge. Their perimeter is made by a plasma etcher rather than a diamond saw. Their edges can be defined and also passivated by growing, in an intermediate step, a field oxide on the side surfaces. In this paper, the basic architecture and results from a synchrotron beam test are presented. © 2006.

KW - 3D

KW - Active edge

KW - Silicon radiation detectors

KW - Silicon radiation sensors

U2 - 10.1016/j.nima.2006.05.012

DO - 10.1016/j.nima.2006.05.012

M3 - Article

SN - 0168-9002

VL - 565

SP - 272

EP - 277

JO - Nuclear Instruments & Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment

JF - Nuclear Instruments & Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment

IS - 1

ER -

Active-edge planar radiation sensors

Abstract

Keywords

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