Alternative Spin-On-Glass (SoG) material characterization for Deep-Submicron (<0.35 um) soft reflow fabrication process

F. Packeer, M. A.M. Zawawi, N. Z.I. Hashim, N. M. Noh, W. M. Jubadi, M. Missous

Research output: Contribution to journalConference articlepeer-review

Abstract

Currently a submicron soft reflow process developed in University of Manchester uses silicon nitride (Si3N4) as the hard mask layer to support the T-Gate structure of pHEMTs in order to make it mechanically stable. However, an alternative material known as Spin-on-Glass (SoG) is introduced to replace Si3N4, offering shorter processing time and consequently, a much simpler and more cost-effective alternative to the e-beam lithography of nanometre-scale gate length transistors. The SoG deposition through plasma-enhanced chemical vapour deposition process requires only 30 minutes to complete, as opposed to the one-day process of depositing Si3N4. In this study, the SoG material used is Silicafilm, and the minimum deposition thickness achieved is 138 nm, enabling 150-nm gate length devices to be fabricated. The SoG is also successfully etched at very low power and pressure (20 W and < 25 mTorr respectively), eliminating the detrimental effect of high power plasma etching to the 2DEG carriers. In addition to that, no film cracks observed even by using a single coating and a single baking temperature of 200 °C. All these results indicate the potential of SoG as a suitable hard mask layer alternative to the silicon nitride for the use soft reflow fabrication process.

Original languageEnglish
Article number012005
JournalIOP Conference Series: Materials Science and Engineering
Volume380
Issue number1
DOIs
Publication statusPublished - 11 Jul 2018
Event2018 6th International Conference on Nanomaterials and Materials Engineering - Langkawi, Malaysia
Duration: 23 Mar 201825 Mar 2018

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