Alumina-chromia coatings deposited by reactive magnetron sputtering

J. M. Schneider, W. D. Sproul, J. Sellers, A. Matthews

Research output: Contribution to journalConference articlepeer-review

Abstract

Chromia and chromia alumina coatings were produced by reactive pulsed dc magnetron sputtering in an argon oxygen ambient. Both the chromia and the chromia-alumina coatings were found to be rhombohedral hexagonal. X-ray diffraction data showed the formation of a solid solution between the two oxides at temperatures as low as 220 °C. Alpha alumina exhibits extraordinarily high hot hardness, high stiffness and excellent high temperature wear resistance. Films were deposited in 5 mTorr total pressure at a source to substrate distance of 100 mm. The substrates were at floating potential and the temperature was 250 °C. The influence of oxygen partial pressure on the microstructure of CrOx coatings was investigated.

Original languageEnglish
Pages (from-to)301-303
Number of pages3
JournalSociety of Vacuum Coaters. Annual Technical Conference Proceedings
Publication statusPublished - 1 Dec 1997
EventProceedings of the 1997 40th Annual Technical Conference - New Orleans, LA, USA
Duration: 12 Apr 199717 Apr 1997

Keywords

  • Alumina
  • Aluminum coating
  • Aluminum Oxide

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