Alumina-chromia coatings deposited by reactive magnetron sputtering

J. M. Schneider; W. D. Sproul; J. Sellers; A. Matthews

Alumina-chromia coatings deposited by reactive magnetron sputtering

J. M. Schneider^*, W. D. Sproul, J. Sellers, A. Matthews

^*Corresponding author for this work

Materials Engineering

Northwestern University

Research output: Contribution to journal › Conference article › peer-review

Abstract

Chromia and chromia alumina coatings were produced by reactive pulsed dc magnetron sputtering in an argon oxygen ambient. Both the chromia and the chromia-alumina coatings were found to be rhombohedral hexagonal. X-ray diffraction data showed the formation of a solid solution between the two oxides at temperatures as low as 220 °C. Alpha alumina exhibits extraordinarily high hot hardness, high stiffness and excellent high temperature wear resistance. Films were deposited in 5 mTorr total pressure at a source to substrate distance of 100 mm. The substrates were at floating potential and the temperature was 250 °C. The influence of oxygen partial pressure on the microstructure of CrO_x coatings was investigated.

Original language	English
Pages (from-to)	301-303
Number of pages	3
Journal	Society of Vacuum Coaters. Annual Technical Conference Proceedings
Publication status	Published - 1 Dec 1997
Event	Proceedings of the 1997 40th Annual Technical Conference - New Orleans, LA, USA Duration: 12 Apr 1997 → 17 Apr 1997

Keywords

Alumina
Aluminum coating
Aluminum Oxide

Cite this

@article{81b701470f1940a7bd4f566c4c73a1fe,

title = "Alumina-chromia coatings deposited by reactive magnetron sputtering",

abstract = "Chromia and chromia alumina coatings were produced by reactive pulsed dc magnetron sputtering in an argon oxygen ambient. Both the chromia and the chromia-alumina coatings were found to be rhombohedral hexagonal. X-ray diffraction data showed the formation of a solid solution between the two oxides at temperatures as low as 220 °C. Alpha alumina exhibits extraordinarily high hot hardness, high stiffness and excellent high temperature wear resistance. Films were deposited in 5 mTorr total pressure at a source to substrate distance of 100 mm. The substrates were at floating potential and the temperature was 250 °C. The influence of oxygen partial pressure on the microstructure of CrOx coatings was investigated.",

keywords = "Alumina, Aluminum coating, Aluminum Oxide",

author = "Schneider, {J. M.} and Sproul, {W. D.} and J. Sellers and A. Matthews",

year = "1997",

month = dec,

day = "1",

language = "English",

pages = "301--303",

journal = "Society of Vacuum Coaters. Annual Technical Conference Proceedings ",

issn = "0737-5921",

publisher = "Society of Plastics Engineers",

note = "Proceedings of the 1997 40th Annual Technical Conference ; Conference date: 12-04-1997 Through 17-04-1997",

}

TY - JOUR

T1 - Alumina-chromia coatings deposited by reactive magnetron sputtering

AU - Schneider, J. M.

AU - Sproul, W. D.

AU - Sellers, J.

AU - Matthews, A.

PY - 1997/12/1

Y1 - 1997/12/1

N2 - Chromia and chromia alumina coatings were produced by reactive pulsed dc magnetron sputtering in an argon oxygen ambient. Both the chromia and the chromia-alumina coatings were found to be rhombohedral hexagonal. X-ray diffraction data showed the formation of a solid solution between the two oxides at temperatures as low as 220 °C. Alpha alumina exhibits extraordinarily high hot hardness, high stiffness and excellent high temperature wear resistance. Films were deposited in 5 mTorr total pressure at a source to substrate distance of 100 mm. The substrates were at floating potential and the temperature was 250 °C. The influence of oxygen partial pressure on the microstructure of CrOx coatings was investigated.

AB - Chromia and chromia alumina coatings were produced by reactive pulsed dc magnetron sputtering in an argon oxygen ambient. Both the chromia and the chromia-alumina coatings were found to be rhombohedral hexagonal. X-ray diffraction data showed the formation of a solid solution between the two oxides at temperatures as low as 220 °C. Alpha alumina exhibits extraordinarily high hot hardness, high stiffness and excellent high temperature wear resistance. Films were deposited in 5 mTorr total pressure at a source to substrate distance of 100 mm. The substrates were at floating potential and the temperature was 250 °C. The influence of oxygen partial pressure on the microstructure of CrOx coatings was investigated.

KW - Alumina

KW - Aluminum coating

KW - Aluminum Oxide

UR - http://www.scopus.com/inward/record.url?scp=0031366809&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0031366809

SN - 0737-5921

SP - 301

EP - 303

JO - Society of Vacuum Coaters. Annual Technical Conference Proceedings

JF - Society of Vacuum Coaters. Annual Technical Conference Proceedings

T2 - Proceedings of the 1997 40th Annual Technical Conference

Y2 - 12 April 1997 through 17 April 1997

ER -

Alumina-chromia coatings deposited by reactive magnetron sputtering

Abstract

Keywords

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