An in-situ Transmission Electron Microscopy study of Fluorine implantation induced damage in Si1-xGex

Huda El Mubarek, A. S. Gandy, M. Al Araimi, H. El Mubarek

Research output: Contribution to conference › Poster

Original language	English
Publication status	Published - Sept 2011
Event	EMAG 2011 - Birmingham UK Duration: 5 Sept 2011 → 9 Sept 2011

Cite this

@conference{173c4c0418ad498c866ce4aaaaefd6e2,

title = "An in-situ Transmission Electron Microscopy study of Fluorine implantation induced damage in Si1-xGex",

author = "{El Mubarek}, Huda and Gandy, {A. S.} and Araimi, {M. Al} and Mubarek, {H. El}",

year = "2011",

month = sep,

language = "English",

note = "EMAG 2011 ; Conference date: 05-09-2011 Through 09-09-2011",

}