Analysis of thin and thick Films

Philippe Le Coustumer, Patrick Chapon, Agnès Tempez, Yuriy Popov, George Thompson, Igor Molchan, Nicolas Trigoulet, Peter Skeldon, Antonino Licciardello, Nunzio Tuccitto, Ivan Delfanti, Katrin Fuhrer, Marc Gonin, James Whitby, Markus Hohl, Christian Tanner, Nerea Bordel Garcia, Lara Lobo Revilla, Jorge Pisonero, Rosario PereiroCristina Gonzalez Gago, Alfredo Sanz Medel, Mihai Ganciu Petcu, Ani Surmeian, Constantin Diplasu, Andreea Groza, Norbert Jakubowski, Roland Dorka, Stela Canulescu, Johann Michler, Philippe Belenguer, Thomas Nelis, Abdellatif Zahri, Philippe Guillot, Laurent Thérèse, Arnaud Littner, Richard Vaux, Julien Malherbe, Frédéric Huneau, Fred Stevie, Hugues François-Saint-Cyr

    Research output: Chapter in Book/Conference proceedingChapter

    Original languageEnglish
    Title of host publicationMass Spectrometry Handbook|Mass Spectrom. Handb.
    PublisherJohn Wiley & Sons Ltd
    Pages943-959
    Number of pages16
    DOIs
    Publication statusPublished - 21 May 2012

    Keywords

    • Ionization source with sensitive MS, flexible analytical platforms for layered material
    • Major MS techniques in thin/thick film applications
    • MS-based techniques and thin and thick layer chemical information
    • Thin and thick film analysis, surface analysis and features
    • Time of sputtering/speed of acquisition trade-off

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