Avoidance of excessive substrate temperatures during plasma assisted processes

^*Corresponding author for this work

Research output: Chapter in Book/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	Ion Assisted Surface Treatments
Publisher	Metals Society
ISBN (Print)	0904357481
Publication status	Published - 1 Dec 1982

Cite this

@inproceedings{d65d00a77f2446dab322390f9d4a91c2,

title = "Avoidance of excessive substrate temperatures during plasma assisted processes",

author = "A. Matthews",

year = "1982",

month = dec,

day = "1",

language = "English",

isbn = "0904357481",

booktitle = "Ion Assisted Surface Treatments",

publisher = "Metals Society",

address = "United Kingdom",

}