Calculating the surface topography of integrated circuit wafers from SEM images

Timothy P. Ellison, Christopher Taylor

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Original languageEnglish
    Title of host publicationhost publication
    PublisherBMVA Press
    Number of pages6
    Publication statusPublished - 1990
    EventBritish Machine Vision Conference -
    Duration: 1 Jan 1824 → …

    Conference

    ConferenceBritish Machine Vision Conference
    Period1/01/24 → …

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