Chapter 8 Aberration-Corrected Imaging in Conventional Transmission Electron Microscopy and Scanning Transmission Electron Microscopy

Angus I. Kirkland; Peter D. Nellist; Lan Yun Chang; Sarah J. Haigh

doi:10.1016/S1076-5670(08)01008-2

Chapter 8 Aberration-Corrected Imaging in Conventional Transmission Electron Microscopy and Scanning Transmission Electron Microscopy

Angus I. Kirkland, Peter D. Nellist, Lan Yun Chang, Sarah J. Haigh

Research output: Chapter in Book/Conference proceeding › Chapter

Abstract

The review and comparison of the operation of aberration corrected instruments in the CTEM and STEM configurations is discussed. Electron optical correctors provide significant control over many other aberrations and introduce certain higher-order aberrations along with correction of the spherical aberration. The image aberration is defined as the differential of the wave aberration function, which is calculated as the distance between the aberrated and ideal wave surfaces in the diffraction plane. The influence of lens aberrations in CTEM image formation can be described by multiplying the electron wave in reciprocal space. Aberration measurement methods for STEM also include to tilt the illuminating beam through the corrector while using a relatively small beam-limiting aperture such that different illumination angles are explored.

Original language	English
Title of host publication	Advances in Imaging and Electron Physics\|Advances Imaging Electron Phys.
Subtitle of host publication	Aberration–Corrected Electron Microscopy
Publisher	Elsevier BV
Pages	283-325
Number of pages	42
Volume	153
DOIs	https://doi.org/10.1016/S1076-5670(08)01008-2
Publication status	Published - 2008

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10.1016/S1076-5670(08)01008-2

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Kirkland, A. I., Nellist, P. D., Chang, L. Y., & Haigh, S. J. (2008). Chapter 8 Aberration-Corrected Imaging in Conventional Transmission Electron Microscopy and Scanning Transmission Electron Microscopy. In Advances in Imaging and Electron Physics|Advances Imaging Electron Phys.: Aberration–Corrected Electron Microscopy (Vol. 153, pp. 283-325). Elsevier BV. https://doi.org/10.1016/S1076-5670(08)01008-2

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title = "Chapter 8 Aberration-Corrected Imaging in Conventional Transmission Electron Microscopy and Scanning Transmission Electron Microscopy",

abstract = "The review and comparison of the operation of aberration corrected instruments in the CTEM and STEM configurations is discussed. Electron optical correctors provide significant control over many other aberrations and introduce certain higher-order aberrations along with correction of the spherical aberration. The image aberration is defined as the differential of the wave aberration function, which is calculated as the distance between the aberrated and ideal wave surfaces in the diffraction plane. The influence of lens aberrations in CTEM image formation can be described by multiplying the electron wave in reciprocal space. Aberration measurement methods for STEM also include to tilt the illuminating beam through the corrector while using a relatively small beam-limiting aperture such that different illumination angles are explored.",

author = "Kirkland, {Angus I.} and Nellist, {Peter D.} and Chang, {Lan Yun} and Haigh, {Sarah J.}",

note = "DOI: 10.1016/S1076-5670(08)01008-2",

year = "2008",

doi = "10.1016/S1076-5670(08)01008-2",

language = "English",

volume = "153",

pages = "283--325",

booktitle = "Advances in Imaging and Electron Physics|Advances Imaging Electron Phys.",

publisher = "Elsevier BV",

address = "Netherlands",

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Kirkland, AI, Nellist, PD, Chang, LY & Haigh, SJ 2008, Chapter 8 Aberration-Corrected Imaging in Conventional Transmission Electron Microscopy and Scanning Transmission Electron Microscopy. in Advances in Imaging and Electron Physics|Advances Imaging Electron Phys.: Aberration–Corrected Electron Microscopy. vol. 153, Elsevier BV, pp. 283-325. https://doi.org/10.1016/S1076-5670(08)01008-2

Chapter 8 Aberration-Corrected Imaging in Conventional Transmission Electron Microscopy and Scanning Transmission Electron Microscopy. / Kirkland, Angus I.; Nellist, Peter D.; Chang, Lan Yun et al.
Advances in Imaging and Electron Physics|Advances Imaging Electron Phys.: Aberration–Corrected Electron Microscopy. Vol. 153 Elsevier BV, 2008. p. 283-325.

Research output: Chapter in Book/Conference proceeding › Chapter

TY - CHAP

T1 - Chapter 8 Aberration-Corrected Imaging in Conventional Transmission Electron Microscopy and Scanning Transmission Electron Microscopy

AU - Kirkland, Angus I.

AU - Nellist, Peter D.

AU - Chang, Lan Yun

AU - Haigh, Sarah J.

N1 - DOI: 10.1016/S1076-5670(08)01008-2

PY - 2008

Y1 - 2008

N2 - The review and comparison of the operation of aberration corrected instruments in the CTEM and STEM configurations is discussed. Electron optical correctors provide significant control over many other aberrations and introduce certain higher-order aberrations along with correction of the spherical aberration. The image aberration is defined as the differential of the wave aberration function, which is calculated as the distance between the aberrated and ideal wave surfaces in the diffraction plane. The influence of lens aberrations in CTEM image formation can be described by multiplying the electron wave in reciprocal space. Aberration measurement methods for STEM also include to tilt the illuminating beam through the corrector while using a relatively small beam-limiting aperture such that different illumination angles are explored.

AB - The review and comparison of the operation of aberration corrected instruments in the CTEM and STEM configurations is discussed. Electron optical correctors provide significant control over many other aberrations and introduce certain higher-order aberrations along with correction of the spherical aberration. The image aberration is defined as the differential of the wave aberration function, which is calculated as the distance between the aberrated and ideal wave surfaces in the diffraction plane. The influence of lens aberrations in CTEM image formation can be described by multiplying the electron wave in reciprocal space. Aberration measurement methods for STEM also include to tilt the illuminating beam through the corrector while using a relatively small beam-limiting aperture such that different illumination angles are explored.

U2 - 10.1016/S1076-5670(08)01008-2

DO - 10.1016/S1076-5670(08)01008-2

M3 - Chapter

VL - 153

SP - 283

EP - 325

BT - Advances in Imaging and Electron Physics|Advances Imaging Electron Phys.

PB - Elsevier BV

ER -

Kirkland AI, Nellist PD, Chang LY, Haigh SJ. Chapter 8 Aberration-Corrected Imaging in Conventional Transmission Electron Microscopy and Scanning Transmission Electron Microscopy. In Advances in Imaging and Electron Physics|Advances Imaging Electron Phys.: Aberration–Corrected Electron Microscopy. Vol. 153. Elsevier BV. 2008. p. 283-325 doi: 10.1016/S1076-5670(08)01008-2

Chapter 8 Aberration-Corrected Imaging in Conventional Transmission Electron Microscopy and Scanning Transmission Electron Microscopy

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