Characterisation of a saddle field source for deposition of diamond-like carbon films

A. A. Voevodin, J. M. Schneider, C. Caperaa, P. Stevenson, A. Matthews

Research output: Contribution to journalArticlepeer-review

Abstract

A saddle field cold cathode source was used to produce diamond-like carbon (DLC) coatings by dissociation and ionisation of acetylene in a low pressure vacuum. Langmuir probe investigations of the ion current density and plasma potentials showed the existence of a positive potential barrier at a distance 100 mm from the source with an ionisation rate up to 80% in the carbon flux in the near source region and less than 15% ionisation at larger distances. Film deposition rate, density and morphology were studied as a function of the geometrical arrangement of the samples. The feasibility of producing DLC films with good uniformity on insulating materials at distances more than 100 mm was shown.

Original languageEnglish
Pages (from-to)1-5
Number of pages5
JournalCeramics International
Volume22
Issue number1
DOIs
Publication statusPublished - 1 Jan 1996

Keywords

  • Etching
  • plasmas
  • beam etching

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