Characterisation of the kratos axis ultra with spherical mirror analyser for XPS imaging

John Walton, Neal Fairley

    Research output: Contribution to journalArticlepeer-review

    Abstract

    The imaging performance of an XPS instrument employing a spherical mirror electron energy analyser has been characterised by measuring the peak position, full width at half maximum (FWHM), and lineshape, at every pixel in the image, for different modes of operation. Changes in these parameters have been identified and recommendations made for quantification of, and chemical state determination from, spectrum image data sets. Copyright © 2006 John Wiley & Sons, Ltd.
    Original languageEnglish
    Pages (from-to)1230-1235
    Number of pages5
    JournalSurface and Interface Analysis
    Volume38
    Issue number8
    DOIs
    Publication statusPublished - Aug 2006

    Keywords

    • Image
    • Spectromicroscopy
    • Spectrum image
    • Spherical mirror analyser
    • XPS

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