Abstract
The imaging performance of an XPS instrument employing a spherical mirror electron energy analyser has been characterised by measuring the peak position, full width at half maximum (FWHM), and lineshape, at every pixel in the image, for different modes of operation. Changes in these parameters have been identified and recommendations made for quantification of, and chemical state determination from, spectrum image data sets. Copyright © 2006 John Wiley & Sons, Ltd.
| Original language | English |
|---|---|
| Pages (from-to) | 1230-1235 |
| Number of pages | 5 |
| Journal | Surface and Interface Analysis |
| Volume | 38 |
| Issue number | 8 |
| DOIs | |
| Publication status | Published - Aug 2006 |
Keywords
- Image
- Spectromicroscopy
- Spectrum image
- Spherical mirror analyser
- XPS