Characteristics of a thermionically assisted triode ion-plating system.

A. Matthews, D. G. Teer

Research output: Contribution to journalConference articlepeer-review

Abstract

There is increasing evidence to show that the properties of ion-plated coatings can be improved by increasing the specimen ion current density and by operating at low deposition pressures. This paper examines a technique of discharge support which facilitates such improvements. The characteristics of the discharge are presented and explanations are given for the effects observed.

Original languageEnglish
Pages (from-to)41-48
Number of pages8
JournalThin Solid Films
Volume80
Issue number1 /2/3
DOIs
Publication statusPublished - 1 Jan 1981
EventIPAT 81, Proc of the Int Conf on Ion and Plasma Assist Tech - Amsterdam, Neth
Duration: 30 Jun 19812 Jul 1981

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