Characteristics of a thermionically assisted triode ion-plating system.

A. Matthews; D. G. Teer

doi:10.1016/0040-6090(81)90204-2

Characteristics of a thermionically assisted triode ion-plating system.

A. Matthews^*, D. G. Teer

^*Corresponding author for this work

Materials Engineering

Research output: Contribution to journal › Conference article › peer-review

Abstract

There is increasing evidence to show that the properties of ion-plated coatings can be improved by increasing the specimen ion current density and by operating at low deposition pressures. This paper examines a technique of discharge support which facilitates such improvements. The characteristics of the discharge are presented and explanations are given for the effects observed.

Original language	English
Pages (from-to)	41-48
Number of pages	8
Journal	Thin Solid Films
Volume	80
Issue number	1 /2/3
DOIs	https://doi.org/10.1016/0040-6090(81)90204-2
Publication status	Published - 1 Jan 1981
Event	IPAT 81, Proc of the Int Conf on Ion and Plasma Assist Tech - Amsterdam, Neth Duration: 30 Jun 1981 → 2 Jul 1981

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10.1016/0040-6090(81)90204-2

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title = "Characteristics of a thermionically assisted triode ion-plating system.",

abstract = "There is increasing evidence to show that the properties of ion-plated coatings can be improved by increasing the specimen ion current density and by operating at low deposition pressures. This paper examines a technique of discharge support which facilitates such improvements. The characteristics of the discharge are presented and explanations are given for the effects observed.",

author = "A. Matthews and Teer, {D. G.}",

year = "1981",

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doi = "10.1016/0040-6090(81)90204-2",

language = "English",

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journal = "Thin Solid Films",

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AU - Matthews, A.

AU - Teer, D. G.

PY - 1981/1/1

Y1 - 1981/1/1

N2 - There is increasing evidence to show that the properties of ion-plated coatings can be improved by increasing the specimen ion current density and by operating at low deposition pressures. This paper examines a technique of discharge support which facilitates such improvements. The characteristics of the discharge are presented and explanations are given for the effects observed.

AB - There is increasing evidence to show that the properties of ion-plated coatings can be improved by increasing the specimen ion current density and by operating at low deposition pressures. This paper examines a technique of discharge support which facilitates such improvements. The characteristics of the discharge are presented and explanations are given for the effects observed.

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U2 - 10.1016/0040-6090(81)90204-2

DO - 10.1016/0040-6090(81)90204-2

M3 - Conference article

AN - SCOPUS:0019572401

SN - 0040-6090

VL - 80

SP - 41

EP - 48

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1 /2/3

T2 - IPAT 81, Proc of the Int Conf on Ion and Plasma Assist Tech

Y2 - 30 June 1981 through 2 July 1981

ER -

Characteristics of a thermionically assisted triode ion-plating system.

Abstract

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