Characterization of junction activation and deactivation using non-equilibrium annealing: Solid phase epitaxy, spike annealing, laser annealing instructions for

M. Bersani, G. Pepponi, D. Giubertoni, S. Gennaro, M. A. Sahiner, S. P. Kelty, M. Kah, K. J. Kirkby, R. Doherty, M. A. Foad, F. Meirer, C. Streli, J. C. Woicik, P. Pianetta

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Original languageEnglish
Title of host publicationExtended Abstracts of the 9th International Workshop on Junction Technology, IWJT 2009
Number of pages5
Publication statusPublished - 2009
Event9th International Workshop on Junction Technology - Kyoto, Japan
Duration: 11 Jun 200912 Jun 2009


Conference9th International Workshop on Junction Technology
Abbreviated titleIWJT 2009

Research Beacons, Institutes and Platforms

  • Manchester Cancer Research Centre

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