Abstract
In this paper the application of microscope-spectrophotometry to the nondestructive characterization of a variety of multi-layer GaAs/AlGaAs structures, is described. Spectral reflectance results are used to indirectly determine variations in aluminum content, and the interdependency of aluminum content with layer thicknesses. The penetration depth of light from the visible spectrum is assessed from the correlation between spectral reflectance measurements and fitted optical models. Finally, a series of single quantum wells are investigated, and it is concluded that a significant improvement in the characterization of these materials will be achieved with an extension of the spectral measurement range into the ultra violet.
Original language | English |
---|---|
Title of host publication | Materials Research Society Symposium Proceedings |
Publisher | Materials Research Society |
Pages | 111-117 |
Number of pages | 7 |
Volume | 324 |
ISBN (Print) | 1558992235 |
Publication status | Published - 1994 |
Event | Proceedings of the 1993 Fall Meeting of the Materials Research Society - Boston, MA, USA Duration: 29 Nov 1993 → 2 Dec 1993 |
Conference
Conference | Proceedings of the 1993 Fall Meeting of the Materials Research Society |
---|---|
City | Boston, MA, USA |
Period | 29/11/93 → 2/12/93 |