Compact Inductors and Baluns Using Multilayer Technology

Q. Sun, L. Krishnamurthy, V. T. Vo And A. A. Rezazadeh???Compact inductors and baluns using multilayer technology???Newly developed miniaturized CPW inductors and spiral baluns using the great flexibility of three-dimensional multilayer technology have been designed and fabricated. On-wafer RF measurements were carried out from 45MHz to 40GHz. Their measured performances are presented. The area of the inductors are almost four time smaller than that of planar design while maintaining the same performance. The spiral baluns are very compact and have amplitude and phase imbalance within 1dB and 10?? in a frequency band from 14GHz to 28GHz with the insertion lost about 1dB. A 2.5 D simulator ADS Momentum and a true 3D simulator Ansoft HFSS were used for EM simulation of which results are compared with the measured data. The miniaturized inductors and baluns are constructed using a combination of three metal and two polyimide dielectric layers on semi-insulating GaAs substrates.