Composite DLC-metal/metal-carbide coatings produced by electron enhanced unbalanced magnetron sputtering

C. Rebholz; H. Ziegele; A. A. Voevodin; J. M. Schneider; A. Matthews

doi:10.1179/sur.1997.13.5.375

Composite DLC-metal/metal-carbide coatings produced by electron enhanced unbalanced magnetron sputtering

C. Rebholz^*, H. Ziegele, A. A. Voevodin, J. M. Schneider, A. Matthews

^*Corresponding author for this work

Materials Engineering

The University of Hull

Research output: Contribution to journal › Article › peer-review

Abstract

Composite coatings consisting of metal containing diamond like carbons were produced by unbalanced magnetron sputtering in a closed field magnetic configuration. Targets of Pta and W were poisoned with acetylene during the deposition process, enabling the formation of a carbon enriched surface layer, which was then sputtered to produce DC-metal/metal-carbide composites. Target poisoning was controlled by plasma emission monitoring, and a hot filament was used to regulate the ion current to the substrates independently of the magnetron power and substrate bias. Coating morphology and composition were investigated using scanning electron microscopy and glow discharge optical emission spectroscopy.

Original language	English
Pages (from-to)	375-383
Number of pages	9
Journal	Surface Engineering
Volume	13
Issue number	5
DOIs	https://doi.org/10.1179/sur.1997.13.5.375
Publication status	Published - 1 Jan 1997

Keywords

Carbon films
Diamond like carbon films
a-C:H films

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title = "Composite DLC-metal/metal-carbide coatings produced by electron enhanced unbalanced magnetron sputtering",

abstract = "Composite coatings consisting of metal containing diamond like carbons were produced by unbalanced magnetron sputtering in a closed field magnetic configuration. Targets of Pta and W were poisoned with acetylene during the deposition process, enabling the formation of a carbon enriched surface layer, which was then sputtered to produce DC-metal/metal-carbide composites. Target poisoning was controlled by plasma emission monitoring, and a hot filament was used to regulate the ion current to the substrates independently of the magnetron power and substrate bias. Coating morphology and composition were investigated using scanning electron microscopy and glow discharge optical emission spectroscopy.",

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author = "C. Rebholz and H. Ziegele and Voevodin, {A. A.} and Schneider, {J. M.} and A. Matthews",

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AU - Rebholz, C.

AU - Ziegele, H.

AU - Voevodin, A. A.

AU - Schneider, J. M.

AU - Matthews, A.

PY - 1997/1/1

Y1 - 1997/1/1

N2 - Composite coatings consisting of metal containing diamond like carbons were produced by unbalanced magnetron sputtering in a closed field magnetic configuration. Targets of Pta and W were poisoned with acetylene during the deposition process, enabling the formation of a carbon enriched surface layer, which was then sputtered to produce DC-metal/metal-carbide composites. Target poisoning was controlled by plasma emission monitoring, and a hot filament was used to regulate the ion current to the substrates independently of the magnetron power and substrate bias. Coating morphology and composition were investigated using scanning electron microscopy and glow discharge optical emission spectroscopy.

AB - Composite coatings consisting of metal containing diamond like carbons were produced by unbalanced magnetron sputtering in a closed field magnetic configuration. Targets of Pta and W were poisoned with acetylene during the deposition process, enabling the formation of a carbon enriched surface layer, which was then sputtered to produce DC-metal/metal-carbide composites. Target poisoning was controlled by plasma emission monitoring, and a hot filament was used to regulate the ion current to the substrates independently of the magnetron power and substrate bias. Coating morphology and composition were investigated using scanning electron microscopy and glow discharge optical emission spectroscopy.

KW - Carbon films

KW - Diamond like carbon films

KW - a-C:H films

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SP - 375

EP - 383

JO - Surface Engineering

JF - Surface Engineering

IS - 5

ER -

Composite DLC-metal/metal-carbide coatings produced by electron enhanced unbalanced magnetron sputtering

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Keywords

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