Conical tungsten stamps for the replication of pore arrays in anodic aluminium oxide films

D. J. Leclere; G. E. Thompson; B. Derby

doi:10.1088/0957-4484/20/24/245304

Conical tungsten stamps for the replication of pore arrays in anodic aluminium oxide films

D. J. Leclere, G. E. Thompson, B. Derby

Research output: Contribution to journal › Article › peer-review

Abstract

A tungsten master stamp has been generated by applying a novel procedure that includes two-step anodizing, followed by sequential anodizing and pore widening to develop nominally funnelled pores. These conical-shaped pores were filled with tungsten by sputter coating to manufacture a master stamp. Under a pressure of 65MPa, the master stamp successfully embossed the surface of annealed and electropolished aluminium. The embossed surface was then used to control the position of pores created by anodizing under the conditions used to produce the original pore array. © 2009 IOP Publishing Ltd.

Original language	English
Article number	245304
Journal	Nanotechnology
Volume	20
Issue number	24
DOIs	https://doi.org/10.1088/0957-4484/20/24/245304
Publication status	Published - 2009

Keywords

POROUS ALUMINA
NANODOT ARRAY
FABRICATION

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10.1088/0957-4484/20/24/245304

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title = "Conical tungsten stamps for the replication of pore arrays in anodic aluminium oxide films",

abstract = "A tungsten master stamp has been generated by applying a novel procedure that includes two-step anodizing, followed by sequential anodizing and pore widening to develop nominally funnelled pores. These conical-shaped pores were filled with tungsten by sputter coating to manufacture a master stamp. Under a pressure of 65MPa, the master stamp successfully embossed the surface of annealed and electropolished aluminium. The embossed surface was then used to control the position of pores created by anodizing under the conditions used to produce the original pore array. {\textcopyright} 2009 IOP Publishing Ltd.",

keywords = "POROUS ALUMINA, NANODOT ARRAY, FABRICATION",

author = "Leclere, {D. J.} and Thompson, {G. E.} and B. Derby",

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AU - Thompson, G. E.

AU - Derby, B.

N1 - Times Cited: 0 1361-6528

PY - 2009

Y1 - 2009

N2 - A tungsten master stamp has been generated by applying a novel procedure that includes two-step anodizing, followed by sequential anodizing and pore widening to develop nominally funnelled pores. These conical-shaped pores were filled with tungsten by sputter coating to manufacture a master stamp. Under a pressure of 65MPa, the master stamp successfully embossed the surface of annealed and electropolished aluminium. The embossed surface was then used to control the position of pores created by anodizing under the conditions used to produce the original pore array. © 2009 IOP Publishing Ltd.

AB - A tungsten master stamp has been generated by applying a novel procedure that includes two-step anodizing, followed by sequential anodizing and pore widening to develop nominally funnelled pores. These conical-shaped pores were filled with tungsten by sputter coating to manufacture a master stamp. Under a pressure of 65MPa, the master stamp successfully embossed the surface of annealed and electropolished aluminium. The embossed surface was then used to control the position of pores created by anodizing under the conditions used to produce the original pore array. © 2009 IOP Publishing Ltd.

KW - POROUS ALUMINA

KW - NANODOT ARRAY

KW - FABRICATION

U2 - 10.1088/0957-4484/20/24/245304

DO - 10.1088/0957-4484/20/24/245304

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VL - 20

JO - Nanotechnology

JF - Nanotechnology

IS - 24

M1 - 245304

ER -

Conical tungsten stamps for the replication of pore arrays in anodic aluminium oxide films

Abstract

Keywords

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