Coplanar waveguide scanning microwave profiler

L.A. Valiente; A. D. Haigh; A.A.P. Gibson; G. Parkinson; G. Jacobs; P.J. Withers; R. Cooper-Holmes

doi:10.1109/EUMC.2007.4405159

Coplanar waveguide scanning microwave profiler

L.A. Valiente, A. D. Haigh, A.A.P. Gibson, G. Parkinson, G. Jacobs, P.J. Withers, R. Cooper-Holmes

Materials Engineering

Research output: Chapter in Book/Conference proceeding › Conference contribution › peer-review

Abstract

A robust near-field microwave profiler is constructed from a micromachined coplanar waveguide probe coupled to a half wavelength coaxial cavity. This microwave profiler can perform both high resolution scanning microwave measurements and more robust, contactable, in-situ handheld measurements. High resolution measurements are undertaken with the sensor on an X-Y-Z scanning table and results for the investigation of metallic strips on dielectric are compared with measurements using a previously reported tapered conical cavity open-ended coaxial probe. The new micromachined probe is considerably more robust than the fine tipped coaxial probe and yet has been shown to yield higher sensitivity for \S₁₁\ and Q measurements when scanning metallic tracks on a dielectric substrate.

Original language	English
Title of host publication	Proceedings of the 37th European Microwave Conference, EUMC
Publisher	IEEE
Pages	194-197
Number of pages	4
ISBN (Print)	9782874870019
DOIs	https://doi.org/10.1109/EUMC.2007.4405159
Publication status	Published - 17 Dec 2007

Keywords

cavity resonators
coaxial resonators
coplanar waveguides
materials testing
imaging

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10.1109/EUMC.2007.4405159

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title = "Coplanar waveguide scanning microwave profiler",

abstract = "A robust near-field microwave profiler is constructed from a micromachined coplanar waveguide probe coupled to a half wavelength coaxial cavity. This microwave profiler can perform both high resolution scanning microwave measurements and more robust, contactable, in-situ handheld measurements. High resolution measurements are undertaken with the sensor on an X-Y-Z scanning table and results for the investigation of metallic strips on dielectric are compared with measurements using a previously reported tapered conical cavity open-ended coaxial probe. The new micromachined probe is considerably more robust than the fine tipped coaxial probe and yet has been shown to yield higher sensitivity for \S11\ and Q measurements when scanning metallic tracks on a dielectric substrate.",

keywords = "cavity resonators, coaxial resonators, coplanar waveguides, materials testing, imaging",

author = "L.A. Valiente and Haigh, {A. D.} and A.A.P. Gibson and G. Parkinson and G. Jacobs and P.J. Withers and R. Cooper-Holmes",

year = "2007",

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doi = "10.1109/EUMC.2007.4405159",

language = "English",

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booktitle = "Proceedings of the 37th European Microwave Conference, EUMC",

publisher = "IEEE",

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TY - GEN

T1 - Coplanar waveguide scanning microwave profiler

AU - Valiente, L.A.

AU - Haigh, A. D.

AU - Gibson, A.A.P.

AU - Parkinson, G.

AU - Jacobs, G.

AU - Withers, P.J.

AU - Cooper-Holmes, R.

PY - 2007/12/17

Y1 - 2007/12/17

N2 - A robust near-field microwave profiler is constructed from a micromachined coplanar waveguide probe coupled to a half wavelength coaxial cavity. This microwave profiler can perform both high resolution scanning microwave measurements and more robust, contactable, in-situ handheld measurements. High resolution measurements are undertaken with the sensor on an X-Y-Z scanning table and results for the investigation of metallic strips on dielectric are compared with measurements using a previously reported tapered conical cavity open-ended coaxial probe. The new micromachined probe is considerably more robust than the fine tipped coaxial probe and yet has been shown to yield higher sensitivity for \S11\ and Q measurements when scanning metallic tracks on a dielectric substrate.

AB - A robust near-field microwave profiler is constructed from a micromachined coplanar waveguide probe coupled to a half wavelength coaxial cavity. This microwave profiler can perform both high resolution scanning microwave measurements and more robust, contactable, in-situ handheld measurements. High resolution measurements are undertaken with the sensor on an X-Y-Z scanning table and results for the investigation of metallic strips on dielectric are compared with measurements using a previously reported tapered conical cavity open-ended coaxial probe. The new micromachined probe is considerably more robust than the fine tipped coaxial probe and yet has been shown to yield higher sensitivity for \S11\ and Q measurements when scanning metallic tracks on a dielectric substrate.

KW - cavity resonators

KW - coaxial resonators

KW - coplanar waveguides

KW - materials testing

KW - imaging

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U2 - 10.1109/EUMC.2007.4405159

DO - 10.1109/EUMC.2007.4405159

M3 - Conference contribution

SN - 9782874870019

SP - 194

EP - 197

BT - Proceedings of the 37th European Microwave Conference, EUMC

PB - IEEE

ER -

Coplanar waveguide scanning microwave profiler

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Keywords

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