Defects and Diffusion in SiGe and Strained Si

A.R. Peaker, V.P. Markevich, John D. Cressler (Editor)

Research output: Chapter in Book/Conference proceeding › Chapter

Original language	English
Title of host publication	Silicon Heterostructure Handbook: Materials, Fabrication, Devices, Circuits and Applications of SiGe and Si Strained-Layer Epitaxy
Publisher	Marcel Dekker Inc
ISBN (Print)	9780849335594
Publication status	Published - 2005

Access to Document

@inbook{84e8df4895204b15b7535323ff481b91,

title = "Defects and Diffusion in SiGe and Strained Si",

author = "A.R. Peaker and V.P. Markevich and Cressler, \{John D.\}",

year = "2005",

language = "English",

isbn = "9780849335594",

booktitle = "Silicon Heterostructure Handbook: Materials, Fabrication, Devices, Circuits and Applications of SiGe and Si Strained-Layer Epitaxy",

publisher = "Marcel Dekker Inc",

address = "United States",

}

TY - CHAP

T1 - Defects and Diffusion in SiGe and Strained Si

AU - Peaker, A.R.

AU - Markevich, V.P.

A2 - Cressler, John D.

PY - 2005

Y1 - 2005

UR - https://www.scopus.com/pages/publications/85056983050

M3 - Chapter

SN - 9780849335594

BT - Silicon Heterostructure Handbook: Materials, Fabrication, Devices, Circuits and Applications of SiGe and Si Strained-Layer Epitaxy

PB - Marcel Dekker Inc

ER -