Abstract
A very low peak voltage GaAs/AlAs resonant tunneling diode (RTD) grown by molecular beam epitaxy (MBE) has been studied in detail. Excellent growth control with atomic-layer precision resulted in a peak voltage of merely 0.28 V (0.53 V) in forward (reverse) direction. The peak current density in forward bias is around 15.4 kA/cm2 with variation of within 7%. As for reverse bias, the peak current density is around 22.8 kA/cm2 with 4% variation which implies excellent scalability. In this work, we have successfully demonstrated the fabrication of a GaAs/AlAs RTD by using a conventional optical lithography and chemical wet-etching with very low peak voltage suitable for application in low dc input power RTD-based sub-millimetre wave oscillators.
Original language | English |
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Pages (from-to) | 30-34 |
Number of pages | 5 |
Journal | Solid-state electronics |
Volume | 138 |
Early online date | 18 Sept 2017 |
DOIs | |
Publication status | Published - 1 Dec 2017 |
Keywords
- AlAs
- GaAs
- III-V compound semiconductor
- Oscillator
- Resonant tunneling diode