Design and fabrication of SiO2/TiO2 dielectric Bragg reflectors by RF sputtering: application to near infrared InGaAs/GaAs/AlGaAs vertical cavity surface emitting laser

M. de la Fargue*, M. Missous

*Corresponding author for this work

Research output: Contribution to conferencePaperpeer-review

Abstract

We have designed and fabricated a SiO2/TiO2 dielectric Bragg reflector to use as a top mirror for a 490nm vertical cavity surface emitting laser. The 490nm emission is a result of second-harmonic generation from a fundamental emission at 980nm. The design and fabrication by RF magnetron sputtering of the mirrors will be discussed and the reflectivity spectra as a function of number of layers will be shown.

Original languageEnglish
Pages176-181
Number of pages6
Publication statusPublished - 1 Dec 1999
Event7th International Symposium on 'High Performance Electron Devices for Microwave and Optoelectronic Applications' (EDMO'99) - London, UK
Duration: 22 Nov 199923 Nov 1999

Conference

Conference7th International Symposium on 'High Performance Electron Devices for Microwave and Optoelectronic Applications' (EDMO'99)
CityLondon, UK
Period22/11/9923/11/99

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