Determination of electron temperature in ion plating discharges by optical emission spectroscopy

K. S. Fancey, A. Matthews

Research output: Contribution to journalArticlepeer-review

Abstract

By the use of Optical Emission Spectroscopy (OES), the electron temperature, Te, is estimated for argon based dc diode and thermionic triode discharge plasmas. In addition, the dependence of Te on the presence of electron beam evaporated titanium in the plasma is investigated. The difficulties associated with calibration when determining Te by OES are highlighted; the uncertainties influence calculated Te values in relative and absolute terms. Nevertheless, our results indicate that (i) Te may rise when discharge enhancement by thermionic emission is utilised, and (ii) Te could be increased significantly by metal evaporation. The implications of these findings are discussed.

Original languageEnglish
Pages (from-to)1013-1015
Number of pages3
JournalVacuum
Volume42
Issue number15
DOIs
Publication statusPublished - 1 Jan 1991

Fingerprint

Dive into the research topics of 'Determination of electron temperature in ion plating discharges by optical emission spectroscopy'. Together they form a unique fingerprint.

Cite this