Determination of interstitial oxygen concentration in germanium by infrared absorption

V. V. Litvinov, B. G. Svensson, L. I. Murin, J. L. Lindström, V. P. Markevich, A. R. Peaker

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    The intensities of infrared absorption due to the asymmetric stretching vibrations of interstitial oxygen atoms in Ge crystals enriched with 16O and 18O isotopes have been compared with oxygen concentrations determined by means of secondary ion mass spectrometry. For Ge samples with oxygen content less than 5 × 1017 cm-3, a good correlation has been found between the values of oxygen concentration and the values of the absorption coefficient at the maximum of the 16Oi related absorption band at 855.6 cm-1 with a proportionality coefficient CO=1.05 × 1017 cm-2.

    Original languageEnglish
    Article number033525
    JournalJournal of Applied Physics
    Issue number3
    Publication statusPublished - 10 Aug 2006

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