Developments in Large Volume 3D Analysis via P-FIB: EBSD & EDS

J Lindsay, Timothy Burnett, J Goulden, Philipp Frankel, Alistair Garner, Bartlomiej Winiarski, Philip Withers

    Research output: Contribution to journalArticlepeer-review


    The integration of electron backscattered diffraction (EBSD) and energy dispersive spectroscopy (EDS) on scanning electron microscopes (SEM) is an increasingly common method of characterising materials. EDS offers chemical quantification and spatial distribution of the elements whilst EBSD enables microstructural characterisation. The integration of these two techniques with simultaneous acquisition, as in the AZtec platform, enables full material characterisation and data correlation within a single user interface.
    Original languageEnglish
    Pages (from-to)284-285
    JournalMicroscopy and Microanalysis
    Issue numberSuppl 1
    Early online date4 Aug 2017
    Publication statusPublished - 2017


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