Abstract
The authors present a direct method to quantitatively measure the indium composition of buried InAs quantum dots embedded in a GaAs matrix. In this method, spatially resolved electron-energy-loss spectroscopy combined with aberration-corrected scanning transmission electron microscopy at atomic resolution was employed to measure compositional profiles across the center of a quantum dot and the adjacent wetting layer. The size and shape of the quantum dots were determined using the Z contrast in high angle annular dark field images. A substantial enrichment in indium at the top of the quantum dots was identified, which is consistent with theoretical predictions. © 2006 American Institute of Physics.
Original language | English |
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Article number | 072111 |
Journal | Applied Physics Letters |
Volume | 89 |
Issue number | 7 |
DOIs | |
Publication status | Published - 2006 |