Direct measurement of composition of buried quantum dots using aberration-corrected scanning transmission electron microscopy

P. Wang, A. L. Bleloch, M. Falke, P. J. Goodhew, J. Ng, M. Missous

    Research output: Contribution to journalArticlepeer-review

    Abstract

    The authors present a direct method to quantitatively measure the indium composition of buried InAs quantum dots embedded in a GaAs matrix. In this method, spatially resolved electron-energy-loss spectroscopy combined with aberration-corrected scanning transmission electron microscopy at atomic resolution was employed to measure compositional profiles across the center of a quantum dot and the adjacent wetting layer. The size and shape of the quantum dots were determined using the Z contrast in high angle annular dark field images. A substantial enrichment in indium at the top of the quantum dots was identified, which is consistent with theoretical predictions. © 2006 American Institute of Physics.
    Original languageEnglish
    Article number072111
    JournalApplied Physics Letters
    Volume89
    Issue number7
    DOIs
    Publication statusPublished - 2006

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