Distribution of deep levels in the GaAs layers of GaAs/AlxGa1-xAs heterostructures grown by MOCVD

D. Allsopp, A. R. Peaker, E. J. Thrush, G. Wale-Evans

Research output: Contribution to journalArticlepeer-review

Abstract

The spatial distributions of deep electron levels in the GaAs layers of GaAs-AlxGa1-xAs heterostructures grown by MOCVD have been measured. Deep states frequently observed in MOCVD AlxGa1-xAs, but not normally found in MOCVD GaAs, were detected. The distributions of these deep levels indicate that their incorporation is related to the contamination of the reactor during the growth of AlxGa1-xAs. The role of vacancies in this process is also discussed.

Original languageEnglish
Pages (from-to)295-300
Number of pages6
JournalJournal of Crystal Growth
Volume68
Issue number1
DOIs
Publication statusPublished - 1 Sept 1984

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