Dual-mode thin film bulk acoustic wave resonators for parallel sensing of temperature and mass loading

L. García-Gancedo; J. Pedrós; X. B. Zhao; G. M. Ashley; A. J. Flewitt; W. I. Milne; C. J B Ford; J. R. Lu; J. K. Luo

doi:10.1016/j.bios.2012.06.023

Dual-mode thin film bulk acoustic wave resonators for parallel sensing of temperature and mass loading

L. García-Gancedo, J. Pedrós, X. B. Zhao, G. M. Ashley, A. J. Flewitt, W. I. Milne, C. J B Ford, J. R. Lu, J. K. Luo

Research output: Contribution to journal › Article › peer-review

Abstract

Thin film bulk acoustic wave resonator (FBAR) devices supporting simultaneously multiple resonance modes have been designed for gravimetric sensing. The mechanism for dual-mode generation within a single device has been discussed, and theoretical calculations based on finite element analysis allowed the fabrication of FBARs whose resonance modes have opposite reactions to temperature changes; one of the modes exhibiting a positive frequency shift for a rise of temperature whilst the other mode exhibits a negative shift. Both modes exhibit negative frequency shift for a mass load and hence by monitoring simultaneously both modes it is possible to distinguish whether a change in the resonance frequency is due to a mass load or temperature variation (or a combination of both), avoiding false positive/negative responses in gravimetric sensing without the need of additional reference devices or complex electronics. © 2012 Elsevier B.V.

Original language	English
Pages (from-to)	369-374
Number of pages	5
Journal	Biosensors and Bioelectronics
Volume	38
Issue number	1
DOIs	https://doi.org/10.1016/j.bios.2012.06.023
Publication status	Published - Oct 2012

Keywords

FBAR
Gravimetric biosensor
Piezoelectric biosensor
Zinc oxide (ZnO)

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10.1016/j.bios.2012.06.023

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title = "Dual-mode thin film bulk acoustic wave resonators for parallel sensing of temperature and mass loading",

abstract = "Thin film bulk acoustic wave resonator (FBAR) devices supporting simultaneously multiple resonance modes have been designed for gravimetric sensing. The mechanism for dual-mode generation within a single device has been discussed, and theoretical calculations based on finite element analysis allowed the fabrication of FBARs whose resonance modes have opposite reactions to temperature changes; one of the modes exhibiting a positive frequency shift for a rise of temperature whilst the other mode exhibits a negative shift. Both modes exhibit negative frequency shift for a mass load and hence by monitoring simultaneously both modes it is possible to distinguish whether a change in the resonance frequency is due to a mass load or temperature variation (or a combination of both), avoiding false positive/negative responses in gravimetric sensing without the need of additional reference devices or complex electronics. {\textcopyright} 2012 Elsevier B.V.",

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author = "L. Garc{\'i}a-Gancedo and J. Pedr{\'o}s and Zhao, {X. B.} and Ashley, {G. M.} and Flewitt, {A. J.} and Milne, {W. I.} and Ford, {C. J B} and Lu, {J. R.} and Luo, {J. K.}",

year = "2012",

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doi = "10.1016/j.bios.2012.06.023",

language = "English",

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AU - García-Gancedo, L.

AU - Pedrós, J.

AU - Zhao, X. B.

AU - Ashley, G. M.

AU - Flewitt, A. J.

AU - Milne, W. I.

AU - Ford, C. J B

AU - Lu, J. R.

AU - Luo, J. K.

PY - 2012/10

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N2 - Thin film bulk acoustic wave resonator (FBAR) devices supporting simultaneously multiple resonance modes have been designed for gravimetric sensing. The mechanism for dual-mode generation within a single device has been discussed, and theoretical calculations based on finite element analysis allowed the fabrication of FBARs whose resonance modes have opposite reactions to temperature changes; one of the modes exhibiting a positive frequency shift for a rise of temperature whilst the other mode exhibits a negative shift. Both modes exhibit negative frequency shift for a mass load and hence by monitoring simultaneously both modes it is possible to distinguish whether a change in the resonance frequency is due to a mass load or temperature variation (or a combination of both), avoiding false positive/negative responses in gravimetric sensing without the need of additional reference devices or complex electronics. © 2012 Elsevier B.V.

AB - Thin film bulk acoustic wave resonator (FBAR) devices supporting simultaneously multiple resonance modes have been designed for gravimetric sensing. The mechanism for dual-mode generation within a single device has been discussed, and theoretical calculations based on finite element analysis allowed the fabrication of FBARs whose resonance modes have opposite reactions to temperature changes; one of the modes exhibiting a positive frequency shift for a rise of temperature whilst the other mode exhibits a negative shift. Both modes exhibit negative frequency shift for a mass load and hence by monitoring simultaneously both modes it is possible to distinguish whether a change in the resonance frequency is due to a mass load or temperature variation (or a combination of both), avoiding false positive/negative responses in gravimetric sensing without the need of additional reference devices or complex electronics. © 2012 Elsevier B.V.

KW - FBAR

KW - Gravimetric biosensor

KW - Piezoelectric biosensor

KW - Zinc oxide (ZnO)

U2 - 10.1016/j.bios.2012.06.023

DO - 10.1016/j.bios.2012.06.023

M3 - Article

SN - 1873-4235

VL - 38

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EP - 374

JO - Biosensors and Bioelectronics

JF - Biosensors and Bioelectronics

IS - 1

ER -

Dual-mode thin film bulk acoustic wave resonators for parallel sensing of temperature and mass loading

Abstract

Keywords

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