E-MRS 2008 Spring Conference Symposium J: Beyond Silicon Technology: Materials and Devices for Post-Si CMOS: Proceedings E-MRS 2008 Spring Conference Symposium J

Cor Claeys; Tony Peaker; Jean Fompeyrine; Martin Frank; Jan Vanhellemont

doi:10.1016/j.mssp.2009.08.001

E-MRS 2008 Spring Conference Symposium J: Beyond Silicon Technology: Materials and Devices for Post-Si CMOS: Proceedings E-MRS 2008 Spring Conference Symposium J

Cor Claeys, Tony Peaker, Jean Fompeyrine, Martin Frank, Jan Vanhellemont

Research output: Book/Report › Scholarly edition

Original language	English
Publisher	Elsevier BV
Volume	11
DOIs	https://doi.org/10.1016/j.mssp.2009.08.001
Publication status	Published - Oct 2008

Publication series

Name	Materials Science in Semiconductor Processing
Publisher	Elsevier

Access to Document

10.1016/j.mssp.2009.08.001

Cite this

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title = "E-MRS 2008 Spring Conference Symposium J: Beyond Silicon Technology: Materials and Devices for Post-Si CMOS: Proceedings E-MRS 2008 Spring Conference Symposium J",

author = "Cor Claeys and Tony Peaker and Jean Fompeyrine and Martin Frank and Jan Vanhellemont",

year = "2008",

month = oct,

doi = "10.1016/j.mssp.2009.08.001",

language = "English",

volume = "11",

series = "Materials Science in Semiconductor Processing",

publisher = "Elsevier BV",

address = "Netherlands",

}

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AU - Peaker, Tony

AU - Fompeyrine, Jean

AU - Frank, Martin

AU - Vanhellemont, Jan

PY - 2008/10

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DO - 10.1016/j.mssp.2009.08.001

M3 - Scholarly edition

VL - 11

T3 - Materials Science in Semiconductor Processing

BT - E-MRS 2008 Spring Conference Symposium J: Beyond Silicon Technology: Materials and Devices for Post-Si CMOS

PB - Elsevier BV

ER -