TY - JOUR
T1 - Enhanced Tracking for Nanopositioning Systems Using Feedforward/Feedback Multivariable Control Design
AU - Kara-Mohamed, Mohamed
AU - Heath, William P
AU - Lanzon, Alexander
N1 - This work was supported in part by the U.K. Engineering and Physical Sciences Research Council under Grant EP/H016600/1 and in part by the University of Manchester, Manchester, U.K.
PY - 2015/4/14
Y1 - 2015/4/14
N2 - This paper proposes a systematic synthesis method- ology for a combined feedforward/feedback architecture to control multiple-input, multiple-output nanopositioning systems. Coprime factorization of the open loop model is used to design the reference and feedforward filters of the proposed control scheme to achieve enhanced tracking, eliminate the limitation of the feed- back on tracking performance, and increase the bandwidth of the closed-loop system. Two types of coprime factorization, namely inner–outer factorization and normalized coprime factorization are discussed. A case study based on hardware experiment is presented to analyze the proposed control architecture and demonstrate its superiority over feedback-only control. In addi- tion to the no-load case, the performance of the system is also tested with loads on the nanopositioning stage.
AB - This paper proposes a systematic synthesis method- ology for a combined feedforward/feedback architecture to control multiple-input, multiple-output nanopositioning systems. Coprime factorization of the open loop model is used to design the reference and feedforward filters of the proposed control scheme to achieve enhanced tracking, eliminate the limitation of the feed- back on tracking performance, and increase the bandwidth of the closed-loop system. Two types of coprime factorization, namely inner–outer factorization and normalized coprime factorization are discussed. A case study based on hardware experiment is presented to analyze the proposed control architecture and demonstrate its superiority over feedback-only control. In addi- tion to the no-load case, the performance of the system is also tested with loads on the nanopositioning stage.
KW - Feedback, feedforward, multivariable control design, nanopositioning, tracking.
U2 - 10.1109/TCST.2014.2360498
DO - 10.1109/TCST.2014.2360498
M3 - Article
SN - 1063-6536
VL - 23
SP - 1003
EP - 1013
JO - I E E E Transactions on Control Systems Technology
JF - I E E E Transactions on Control Systems Technology
IS - 3
ER -