Exceeding conventional resolution limits in high-resolution transmission electron microscopy using tilted illumination and exit-wave restoration

Sarah J. Haigh; Hidetaka Sawada; Kunio Takayanagi; Angus I. Kirkland

doi:10.1017/S1431927610093359

Exceeding conventional resolution limits in high-resolution transmission electron microscopy using tilted illumination and exit-wave restoration

Sarah J. Haigh, Hidetaka Sawada, Kunio Takayanagi, Angus I. Kirkland

Research output: Contribution to journal › Article › peer-review

Abstract

Tilted illumination exit-wave restoration is compared for two aberration-corrected instruments at different accelerating voltages. The experimental progress of this technique is also reviewed and the significance of off-axial aberrations examined. Finally, the importance of higher order aberration compensation combined with careful correction of the lower order aberrations is highlighted. © 2010 Microscopy Society of America.

Original language	English
Pages (from-to)	409-415
Number of pages	6
Journal	Microscopy and Microanalysis
Volume	16
Issue number	4
DOIs	https://doi.org/10.1017/S1431927610093359
Publication status	Published - Aug 2010

Keywords

aberration correction
aperture synthesis
electron microscopy
exit-wave reconstruction
high resolution

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10.1017/S1431927610093359

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title = "Exceeding conventional resolution limits in high-resolution transmission electron microscopy using tilted illumination and exit-wave restoration",

abstract = "Tilted illumination exit-wave restoration is compared for two aberration-corrected instruments at different accelerating voltages. The experimental progress of this technique is also reviewed and the significance of off-axial aberrations examined. Finally, the importance of higher order aberration compensation combined with careful correction of the lower order aberrations is highlighted. {\textcopyright} 2010 Microscopy Society of America.",

keywords = "aberration correction, aperture synthesis, electron microscopy, exit-wave reconstruction, high resolution",

author = "Haigh, {Sarah J.} and Hidetaka Sawada and Kunio Takayanagi and Kirkland, {Angus I.}",

note = "Times Cited: 0 Conference on Aberration-Corrected Electron Microscopy JUL, 2009 Richmond, VA",

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AU - Sawada, Hidetaka

AU - Takayanagi, Kunio

AU - Kirkland, Angus I.

N1 - Times Cited: 0 Conference on Aberration-Corrected Electron Microscopy JUL, 2009 Richmond, VA

PY - 2010/8

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AB - Tilted illumination exit-wave restoration is compared for two aberration-corrected instruments at different accelerating voltages. The experimental progress of this technique is also reviewed and the significance of off-axial aberrations examined. Finally, the importance of higher order aberration compensation combined with careful correction of the lower order aberrations is highlighted. © 2010 Microscopy Society of America.

KW - aberration correction

KW - aperture synthesis

KW - electron microscopy

KW - exit-wave reconstruction

KW - high resolution

U2 - 10.1017/S1431927610093359

DO - 10.1017/S1431927610093359

M3 - Article

SN - 1431-9276

VL - 16

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JO - Microscopy and Microanalysis

JF - Microscopy and Microanalysis

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Exceeding conventional resolution limits in high-resolution transmission electron microscopy using tilted illumination and exit-wave restoration

Abstract

Keywords

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