Fabrication of multilayered SU8 structure for terahertz waveguide with ultralow transmission loss

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	013002
Number of pages	1
Journal	Journal of Micro/Nanolithography, MEMS, and MOEMS
Volume	13
Issue number	1
DOIs	https://doi.org/10.1117/1.JMM.13.1.013002
Publication status	Published - 1 Jan 2014

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title = "Fabrication of multilayered SU8 structure for terahertz waveguide with ultralow transmission loss",

author = "Yingtao Tian and Xiaobang Shang and Lancaster, \{Michael J.\}",

year = "2014",

month = jan,

day = "1",

doi = "10.1117/1.JMM.13.1.013002",

language = "English",

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pages = "013002",

journal = "Journal of Micro/Nanolithography, MEMS, and MOEMS",

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}

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T1 - Fabrication of multilayered SU8 structure for terahertz waveguide with ultralow transmission loss

AU - Tian, Yingtao

AU - Shang, Xiaobang

AU - Lancaster, Michael J.

PY - 2014/1/1

Y1 - 2014/1/1

U2 - 10.1117/1.JMM.13.1.013002

DO - 10.1117/1.JMM.13.1.013002

M3 - Article

SN - 1932-5150

VL - 13

SP - 013002

JO - Journal of Micro/Nanolithography, MEMS, and MOEMS

JF - Journal of Micro/Nanolithography, MEMS, and MOEMS

IS - 1

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