Fabrication of novel unipolar nanodiodes in InAs/AlSb for microwave detection

L.Q. Zhang; Y. Alimi; C. Balocco; H. Zhao; A. Westlund; G. Moschetti; P.-Å. Nilsson; J. Grahn; A.M. Song

doi:10.1109/irmmw-THz.2011.6104983

Fabrication of novel unipolar nanodiodes in InAs/AlSb for microwave detection

L.Q. Zhang, Y. Alimi, C. Balocco, H. Zhao, A. Westlund, G. Moschetti, P.-Å. Nilsson, J. Grahn, A.M. Song

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We report on the fabrication of unipolar nanodiodes into an InAs/Al xGa 1-xSb quantum-well heterostructure for room temperature microwave detection up to 110 GHz. Electron-beam lithography was combined with both dry- and wet-etching, and we explored the differences in the electric and detection parameters with the two methods.

Original language	Undefined
Title of host publication	IRMMW-THz 2011 - 36th International Conference on Infrared, Millimeter, and Terahertz Waves
DOIs	https://doi.org/10.1109/irmmw-THz.2011.6104983
Publication status	Published - 2011

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10.1109/irmmw-THz.2011.6104983

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@inproceedings{1b565e12d3d54f9aa04df827942ea688,

title = "Fabrication of novel unipolar nanodiodes in InAs/AlSb for microwave detection",

abstract = "We report on the fabrication of unipolar nanodiodes into an InAs/Al xGa 1-xSb quantum-well heterostructure for room temperature microwave detection up to 110 GHz. Electron-beam lithography was combined with both dry- and wet-etching, and we explored the differences in the electric and detection parameters with the two methods. ",

author = "L.Q. Zhang and Y. Alimi and C. Balocco and H. Zhao and A. Westlund and G. Moschetti and P.-{\AA}. Nilsson and J. Grahn and A.M. Song",

year = "2011",

doi = "10.1109/irmmw-THz.2011.6104983",

language = "Undefined",

isbn = "978-145770509-0",

booktitle = "IRMMW-THz 2011 - 36th International Conference on Infrared, Millimeter, and Terahertz Waves",

}

TY - GEN

T1 - Fabrication of novel unipolar nanodiodes in InAs/AlSb for microwave detection

AU - Zhang, L.Q.

AU - Alimi, Y.

AU - Balocco, C.

AU - Zhao, H.

AU - Westlund, A.

AU - Moschetti, G.

AU - Nilsson, P.-Å.

AU - Grahn, J.

AU - Song, A.M.

PY - 2011

Y1 - 2011

N2 - We report on the fabrication of unipolar nanodiodes into an InAs/Al xGa 1-xSb quantum-well heterostructure for room temperature microwave detection up to 110 GHz. Electron-beam lithography was combined with both dry- and wet-etching, and we explored the differences in the electric and detection parameters with the two methods.

AB - We report on the fabrication of unipolar nanodiodes into an InAs/Al xGa 1-xSb quantum-well heterostructure for room temperature microwave detection up to 110 GHz. Electron-beam lithography was combined with both dry- and wet-etching, and we explored the differences in the electric and detection parameters with the two methods.

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84862954833&partnerID=MN8TOARS

U2 - 10.1109/irmmw-THz.2011.6104983

DO - 10.1109/irmmw-THz.2011.6104983

M3 - Conference contribution

SN - 978-145770509-0

BT - IRMMW-THz 2011 - 36th International Conference on Infrared, Millimeter, and Terahertz Waves

ER -

Fabrication of novel unipolar nanodiodes in InAs/AlSb for microwave detection

Abstract

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