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Fabrication of poly(3-hexylthiophene) self-switching diodes using thermal nanoimprint lithography and argon milling

    Research output: Contribution to journalArticlepeer-review

    Abstract

    In this article, the fabrication of poly(3-hexylthiophene) self-switching diodes (SSDs) is described. The unique design of the SSD enables it to be fabricated from a single layer of semiconductor material with a single lithographic step using nanoimprint lithography combined with argon milling. The resultant device morphology showed good uniformity and the SSDs exhibited pronounced current rectification and wide working voltage range. © 2009 American Vacuum Society.
    Original languageEnglish
    Pages (from-to)2801-2804
    Number of pages3
    JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
    Volume27
    Issue number6
    DOIs
    Publication statusPublished - 2009

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